Complementary application of electron microscopy and micro-Raman spectroscopy for microstructure, stress, and bonding defect investigation of heteroepitaxial chemical vapor deposited diamond films

Journal of Applied Physics

Volumn 83, Issue 1, 1998, Pages 187-197

  Michler, J ^a   Von Kaenel, Y ^a   Stiegler, J ^a   Blank, E ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; CRYSTAL MICROSTRUCTURE; DIAMOND FILMS; GRAIN SIZE AND SHAPE; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

BONDING DEFECT; MICRO RAMAN SPECTROSCOPY;

ELECTRON MICROSCOPY;

EID: 0031699377     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366672     Document Type: Article

References (38)

1. L. Chandra, M. Chhowalla, G. A. J. Amaratunga, and T. W. Clyne, Diamond Relat. Mater. 5, 674 (1996).
2. B. A. Fox, B. R. Stoner, D. M. Malta, P. J. Ellis, R. C. Glass, and F. R. Silvazlian, Diamond Relat. Mater. 3, 382 (1994).
3. D. S. Knight and W. B. White, J. Mater. Res. 4, 385 (1989).
4. H. Windischmann and K. J. Gray, Diamond Relat. Mater. 4, 837 (1995).
5. Y. von Kaenel, J. Stiegler, J. Michler, and E. Blank, J. Appl. Phys. 81, 1726 (1997).
6. W. Zhu, in Diamond: Electronic Properties and Applications (Kluwer Academic, Boston, 1995).
7. R. E. Clausing, L. Heatherely, and K. L. More, Surf. Coat. Technol. 39/40, 199 (1989).
8. H. Eto, Y. Tamou, Y. Ohsawa, and N. Kikuchi, Diamond Relat. Mater. 1, 373 (1992).
9. W. Zhu, C. A. Randall, A. R. Badzian, and R. Messier, J. Vac. Sci. Technol. A 7, 2315 (1989).
10. J. Michler, J. Stiegler, Y. von Kaenel, P. Moeckli, W. Dorsch, D. Stenkamp, and E. Blank, J. Cryst. Growth 172, 404 (1997).
11. P. J. Fallon and L. M. Brown, Diamond Relat. Mater 2, 1004 (1993).
12. L. Bergmann and R. J. Nemanich, J. Appl. Phys. 78, 6709 (1995).
13. H. Windischmann, G. F. Epps, Y. Cong, and R. W. Collins, J. Appl. Phys. 69, 2231 (1991).
14. Y. von Kaenel, J. Stiegler, E. Blank, O. Chauvet, CH. Hellwig, and K. Plamann, Phys. Status Solidi A 154, 219 (1996).
15. M. Kamo, Y. Sato, S. Matsumoto, and N. Setaka, J. Cryst. Growth 62, 642 (1983).
16. P. Wurzinger, M. Joksch, and P. Pongratz, Inst. Phys. Conf. Ser. 134, 157 (1993).
17. J. Hornstra, J. Phys. Chem. Solids 5, 129 (1958).
18. J.-P. Hirth and J. Lothe, Theory of Dislocations (McGraw-Hill, New York 1968).
19. J. W. Ager III and M. D. Drory, Phys. Rev. B 48, 2601 (1993).
20. N. C. Burton, J. W. Steeds, G. M. Meaden, Y. G. Shreter, and J. E. Butler, Diamond Relat. Mater. 4, 1222 (1995).
21. M. Schreck and B. Stritzker, Phys. Status Solidi A 154, 197 (1996).
22. C. Wild, P. Koidl, W. Müller-Sebert, H. Walcher, R. Kohl, N. Herres, and L. Locher, Diamond Relat. Mater. 2, 158 (1993).
23. N. Bozzolo, S. Barrat, I. Diuguez, and E. Bauer-Grosse, Diamond Relat. Mater. 6, 41 (1997).
24. A. van der Drift, Philips Res. Rep. 22, 267 (1967).
25. Z. L. Wang, J. Bentley, R. E. Clausing, L. Heatherly, and L. L. Horton, J. Mater. Res. 9, 1552 (1994).
26. F. R. Sivazlian, J. T. Glass, and B. R. Stoner, J. Mater. Res. 9, 2487 (1994).
27. T. J. Kistenmacher, S. A. Ecelberger, and R. B. Stoner, Diamond Relat. Mater. 4, 1289 (1995).
28. X. Jiang and C.-P. Klages, Phys. Status Solidi A 154, 175 (1996).
29. C. J. Chen, L. Chang, T. S. Lin, and F. R. Chen, J. Mater. Res. 10, 3041 (1995).
30. S. Christiansen, M. Albrecht, J. Michler, and H. P. Strunk, Phys. Status Solidi A 156, 129 (1996).
31. M. Mermoux, L. Fayette, B. Marcus, N. Rosman, L. Abello, and G. Lucazeau, Phys. Status Solidi A 154, 55 (1996).
32. D. Schwarzbach, R. Haubner, and B. Lux, Diamond Relat. Mater. 3, 757 (1994).
33. L. Schäfer, X. Jiang, and C. P. Klages, in Applications in Diamond Films and Related Materials, edited by Y. Tzeng, M. Yoshikawa, M. Murakawa, and A. Feldman (Elsevier, New York, 1991), p. 121.
34. A. E. Romanov and V. I. Vladimirov, in Dislocations in Solids, edited by F. Nabarro (North Holland, Amsterdam, 1992), Vol. 9, p. 191.
35. X. Jiang and C. L. Jia, Appl. Phys. Lett. 69, 3902 (1996).
36. M. Joksch, Dissertation, Technische Universität Wien, Austria, 1996.
37. G. Davies, Properties and Growth of Diamond (INSPEC, London, 1994).
38. J. R. Morris, C. L. Fu, and K. M. Ho, Phys. Rev. B 54, 132 (1996).