Czochralski Process Dynamics and Control Design

Crystal Growth Processes Based on Capillarity: Czochralski, Floating Zone, Shaping and Crucible Techniques

Volumn , Issue , 2010, Pages 115-202

  Winkler, Jan ^a   Neubert, Michael ^b   Rudolph, Joachim ^c   Duanmu, Ning ^d   Gevelber, Michael ^e  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b LEIBNIZ INSTITUT IM FORSCHUNGSVERBUND BERLIN E V   (Germany)

^c SAARLAND UNIVERSITY   (Germany)

^d GT Solar   (United States)

^e Boston University   (United States)

Author keywords

Conventional control design optical diameter estimation based control design; Cz control approaches proper manipulative variable control; Cz crystal growth control requirements and issues; Cz crystal growth control system components; Cz growth process control design advanced techniques; Czochralski (Cz) process dynamics and control design; Geometry based nonlinear control design; Low order modelling (LOM) techniques hydromechanical geometrical model; Mathematical modelling for analysis and controller design LOM technique; Process dynamics analysis for control

Indexed keywords

EID: 84886148206     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9781444320237.ch3     Document Type: Chapter

References (119)

1. Abrosimov N., Kurlov V., Rossolenko S., Prog. Crystal Growth Charact. Mat. 46(2003)1-57.
2. Allgöwer F., Zheng A. (eds.), Nonlinear Model Predictive Control. Progress in Systems and Control Theory. Birkhäuser Verlag, Basel(2007).
3. Anderson D., Worster M.G., Davis S., J. Cryst. Growth 163(1996)329-338.
4. Arpaci V.S., Conduction Heat Transfer. Addison-Wesley, Reading, MA(1966).
5. Assaker R., van den Bogaert N., Dupret F., J. Cryst. Growth 180(1997) 450-460.
6. Åström K.J., Wittenmark B., Adaptive Control, Chapter 9. Prentice Hall, Englewood Cliffs, NJ(1994).
7. Atherton L.J., Derby J.J., Brown R.A., J. Cryst. Growth(1987)57-78.
8. Azuma K., Japanese Patent No. 60-11299(1983).
9. Bachmann K., Kirsch H., Vetter K., J. Cryst. Growth 7(1970)290-295.
10. Bakovets V., J. Cryst. Growth 193(1998)720-727.
11. Bardsley W., Green G., Holliday C., Hurle D., J. Cryst. Growth 16(1972) 277-279.
12. Bardsley W., Cockayne B., Green G., Hurle D., Joyce G., Roslington J., Tufton P., Weber H., J. Cryst. Growth 24/25(1974)369-373.
13. Bardsley W., Frank F., Green G., Hurle D., J. Cryst. Growth 23(1974) 341-344.
14. Bardsley W., Hurle D., Joyce G., J. Cryst. Growth 40(1977)13-20.
15. Bardsley W., Hurle D., Joyce G., Wilson G., J. Cryst. Growth 40(1977) 21-28.
16. Bejan A., Heat Transfer. John Wiley & Sons, Ltd, New York(1993).
17. Bestle D., Zeitz M., Int. J. Control 38(1983)419-431.
18. Bornside D., Kinney T., Brown R., Kim G., Int. J. Numer. Meth. Eng. 30(1990) 133-154.
19. Bornside D., Kinney T., Brown R., J. Cryst. Growth 108(1991)779-805.
20. Boucher E., Jones T., J. Chem. Soc. Faraday Trans. I(1980)1419-1432.
21. Brice J., J. Cryst. Growth 6(1970)205-206.
22. Brown G., Kinney T., Sackinger P., Bornside D., J. Cryst. Growth 97(1989) 99-115.
23. Camacho E., Bordons C., Model Predictive Control. Springer, New York(2004).
24. Crowley A., IMA J. Appl. Math. 30(1983)173-189.
25. Derby J., Brown R., J. Electrochem. Soc.(1985)470-482.
26. Derby J., Brown R., J. Cryst. Growth 74(1986)605-624.
27. Derby J., Brown R., J. Cryst. Growth 75(1986)227-240.
28. Derby J., Brown R., J. Cryst. Growth 83(1987)137-151.
29. Digges T., Hopkins R., Seidensticker R., J. Cryst. Growth 29(1975)326.
30. Domey K., Solid State Technol. 10(1971)41-45.
31. Dornberger E., von Ammon W., van den Bogaert N., Dupret F., J. Cryst. Growth 166(1996)452-457.
32. Dornberger E., Tomzig E., Seidl A., Schmitt S., Leister H.J., Schmitt C., Müller G., J. Cryst. Growth 180(1997)461-467.
33. Dornberger E., Virbulis J., Hanna B., Hoelzl R., Dauba E., von Ammon W., J. Cryst. Growth 229(2001)11-16.
34. Duanmu N., PhD thesis, College of Engineering, Boston University, USA (2006).
35. Dupret F., Nicodeme P., Ryckmans Y., Wouters P., Crochet M.J., Int. J. Heat Mass Trans. 33(1990)1849-1871.
36. Egorov L., Tsivinskii S., Zatulovskii L., Bull. Acad. Sci. USSR Phys. Ser. 40(1976) 172-174.
37. Ekhult U., Carlberg T., J. Cryst. Growth 76(1986)317-322.
38. Falster R., Voronkov V., Mater. Res. Soc. Bull.(2000)28-32.
39. Fliess M., Levine J., Martin P., Rouchon P., Int. J. Control 61(1995)1327-1361.
40. Fliess M., Rudolph J., Proc. Symp. Control, Optimization, and Supervision, IMACS Multiconference, Lille, pp. 213-217.
41. Fliess M., Rudolph J., C.R. Acad. Sci. Paris Ser. IIb 324(1997)513-519.
42. Frank, Ch., Jacob K., Neubert M., Rudolph P., Fainberg J., Müller G., J. Cryst. Growth 213(2000)10-18.
43. Franklin G., Powell J., Emami-Naeini A., Feedback Control of Dynamic Systems, 4th ed., Chapter 3, Prentice Hall, Englewood Cliffs, NJ(2002), pp. 150-166.
44. Franklin G., Powell J., Emami-Naeini A., Feedback Control of Dynamic Systems, 4th ed., Appendix D, Prentice Hall, Englewood Cliffs, NJ(2002), pp. 849-856.
45. Gevelber M., Stephanopoulos G., J. Cryst. Growth 84(1987)647-668.
46. Gevelber M., Wargo M., Stephanopoulos G., J. Cryst. Growth 85(1987) 256-263.
47. Gevelber M., Stephanopoulos G., Wargo M., J. Cryst. Growth 91(1988) 199-217.
48. Gevelber M., Stephanopoulos G., US Patent No. 4,857,278, 15 August 1989.
49. Gevelber M., J. Cryst. Growth 139(1994)271-285.
50. Gevelber M., J. Cryst. Growth 139(1994)286-301.
51. Gevelber M.A., In: Encyclopedia of Electrical and Electronic Engineering, John Wiley & Sons, Ltd, New York(1999), pp. 255-265.
52. Gevelber M., Wilson D., Duanmu N., J. Cryst. Growth 230(2001)217-223.
53. Gross U., Kersten R., J. Cryst. Growth 15(1972)85.
54. Graichen K., Hagenmeyer V., Zeitz M., Automatica 41(2005)2033-2041.
55. Hurle D. J. Cryst. Growth 42(1977)473-482.
56. Hurle D., Joyce G., Wilson G., Ghassempoory M., Morgan C., J. Cryst. Growth 74 (1986)480-490.
57. Hurle D., Joyce G., Ghassempoory M., Crowley A., Stern E., J. Cryst. Growth 100 (1990)11-25.
58. Hurle D., In: Sir Charles Frank, OBE, FRS: An 80th Birthday Tribute, ed. R. Chambers, J. Enderby, A. Keller, A. Lang, J Steeds, Adam Hilger Publishing, Bristol(1991), pp. 188-206.
59. Hurle D., J. Cryst. Growth 128(1993)15-25.
60. Irizarry-Rivera R., Seider W. D., J. Cryst. Growth 178(1997) 593-611.
61. Irizarry-Rivera R., Seider W. D., J. Cryst. Growth 178(1997)612-633.
62. Jaluria Y., Torrance K.E., Computational Heat Transfer, Hemisphere Publishing, New York(1986).
63. Johansen T., J. Cryst. Growth 84(1987)609-620.
64. Johansen T., J. Cryst. Growth 80(1987)343-350.
65. Johansen T., J. Cryst. Growth 114(1991)27-30.
66. Johansen T., J. Cryst. Growth 118(1992)353-359.
67. Johansen T., J. Cryst. Growth 123(1992)188-194.
68. Jordan A., Caruso R., von Neida A., Nielsen J., J. Appl. Phys. 52(1981) 3331-3336.
69. Jordan A., Caruso R., von Neida A., Bell System Tech. J. 62(1983)477-498.
70. Jordan A., von Neida A., Caruso R., J. Cryst. Growth 70(1984)555-573.
71. Kiessling F.-M., Albrecht M., Irmscher K., Krause-Rehberg R., Ulricic W., Rudolph P., J. Cryst. Growth 310(2008)1418-1423.
72. Kim K., Kran A., Smetana P., Schwuttke G., J. Electrochem. Soc. 130(1983) 1156-1160.
73. Kinney T.A., Bornside D.E., Brown R.A., Kim K.M., J. Cryst. Growth 126(1993) 413-434.
74. Kubota E., Cryst. Res. Technol. 34(1999)539-548.
75. Levinson J., US Patent No. 2,908,004, 6 October 1959.
76. Ljung L., System Identification: Theory for the User. Prentice Hall, Englewood Cliffs, NJ(1987).
77. Looze D., Farzin A., Bernstein B., J. Cryst. Growth 148(1995)79-95.
78. Lorenzini R., Neff F., Blair D., Solid State Technol. 2(1974)33.
79. Luenberger D.G., IEEE Trans. Mil. Electron. 8(1964)74-80.
80. Masi M., Carra S., Polli M., Ratti M., Guadalupi G., Mater. Chem. Phys. 66(2000) 236-245.
81. Mika K., Uelhoff W., J. Cryst. Growth 30(1975)9-20.
82. Motakef S., Kelly K., Koai K., J. Cryst. Growth 113(1991)279-288.
83. Nalbandyan H., J. Cryst. Growth 67(1984)115-118.
84. Neubert M., Rudolph P., Prog. Cryst. Growth Charact. Mat.(2001)119-185.
85. Patzner E., Dessauer R., Poponiak M., Solid State Technol. 10(1967)25-30.
86. Riedling K., J. Cryst. Growth 89(1988)435-446.
87. Rossolenko S., Pet'kov I., Kurlov V., Red'kin B., J. Cryst. Growth 116(1992) 185-190.
88. Rothfuss R., Rudolph J., Zeitz M., Automatica 32(1996)1433-1439.
89. Rummel T., US Patent No. 3,259,467, 5 July 1966.
90. Satunkin G., Rossolenko S., Cryst. Res. Technol. 21(1986)1125-1138.
91. Satunkin G., Rossolenko S., Kurlov V., Reg'kin B., Tatartchenko V., Avrutik A., Cryst. Res. Technol. 21(1986)1257-1264.
92. Satunkin G., Leonov A., J. Cryst. Growth 102(1990)592-608.
93. Satunkin G., J. Cryst. Growth 154(1995)172-188.
94. Sinno T., von Ammon E.D.W., Brown R.A., Dupret F., Mater. Sci. Eng. 28(2000) 149-198.
95. Srivastava R., Ramachandran P., Dudukovic M., J. Cryst. Growth 76(1986) 395-407.
96. Steel G., Hill M., J. Cryst. Growth 30(1975)45-53.
97. Surek T., J. Appl. Phys. 47(1976)4384-4393.
98. Surek T., Coriell S., Chalmers B., J. Cryst. Growth 50(1980)21-32.
99. Tatartchenko V., Brener E., J. Cryst. Growth 50(1980)33-44.
100. Teal G., Little J., Phys. Rev. 78(1950)647.
101. Thomas P., Derby J., Atherton L., Brown R., J. Cryst. Growth 96(1989) 135-152.
102. Valentino A., Brandle C., J. Cryst. Growth 26(1974)1-5.
103. van den Bogaert N., Dupret F., J. Cryst. Growth 171(1997)65-76.
104. van den Bogaert N., Dupret F., J. Cryst. Growth 171(1997)77-93.
105. van Dijk H., Jochem C., Scholl G., van der Werf P., J. Cryst. Growth 21(1974) 310-312.
106. Virozub A., Rasin I., Brandon S., J. Cryst. Growth 310(2008)5416-5422.
107. Voigt A., Metzger M., Numerical simulation and control of industrial crystal growth by the Czochralski and vertical gradient freeze method. Caesar Preprint.
108. Vojdani S., Dabiri A., Ashoori H., J. Cryst. Growth 24/25(1974)374-375.
109. Voronkov V. V., J. Cryst. Growth 59(1982)625-643.
110. Voronkov V., Mutti P., US Patent No. US 2002/0043208 A1(2002).
111. Voronkov V., Mutti P., US Patents Nos US 2002/043206 and US 6726764.
112. Warwick K., Rees D. (eds), Industrial Digital Control Systems, Chapter 14.7. Peter Peregrinus, Stevenage(1988).
113. Wilde J., Hesselink L., Feigelson R., J. Cryst. Growth 113(1991)337-359.
114. Wilke K., Bohm J., Kristallzüchtung. VEB Deutscher Verlag der Wissenschaften, Berlin(1988).
115. Wilson D., Master's thesis, Department of Electrical and Computer Engineering, Boston University, USA(2001).
116. Winkler J., Beiträge zur Regelung des Czochralski Kristallzüchtungsprozesses zur Herstellung von Verbindungshalbleitern. Shaker Verlag, Aachen.
117. Winkler J., Neubert M., Rudolph J., J. Cryst. Growth 312(2010)1005-1018.
118. Winkler J., Neubert M., Rudolph J., J. Cryst. Growth 312(2010)1019-1028.
119. Zinnes A., Nevis B., J. Cryst. Growth 19(1973)187-192.