Nonlinear model-based control of the Czochralski process I: Motivation, modeling and feedback controller design

Journal of Crystal Growth

Volumn 312, Issue 7, 2010, Pages 1005-1018

  Winkler, J ^a   Neubert, M ^b   Rudolph, J ^c  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b LEIBNIZ INSTITUTE FOR CRYSTAL GROWTH   (Germany)

^c SAARLAND UNIVERSITY   (Germany)

Author keywords

A1. Growth models; A1. Model based feedback control; A2. Czochralski method; A2. Liquid encapsulated Czochralski method; B2. Semiconducting materials

Indexed keywords

A1. MODEL-BASED FEEDBACK CONTROL; CZOCHRALSKI METHODS; GROWTH MODELS; LIQUID ENCAPSULATED CZOCHRALSKI METHOD; MODEL-BASED; SEMICONDUCTING MATERIALS;

CONTROLLERS; FEEDBACK CONTROL; GALLIUM ARSENIDE; GALLIUM PHOSPHIDE; INDIUM ARSENIDE; LIQUIDS; MATHEMATICAL MODELS; NONLINEAR FEEDBACK; PROPORTIONAL CONTROL SYSTEMS; ROBUST CONTROL; SEMICONDUCTING INDIUM; SEMICONDUCTOR GROWTH; THREE TERM CONTROL SYSTEMS;

PROCESS CONTROL;

EID: 77249161618     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2009.12.074     Document Type: Article

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