Modelling requirements for development of an advanced Czochralski control system

Journal of Crystal Growth

Volumn 230, Issue 1-2, 2001, Pages 217-223

  Gevelber, Michael ^a   Wilson, Danielle ^a   Duanmu, Ning ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

A1. Computer simulation; A1. Control system design; A1. Growth models; A1. Heat transfer; A2. Czochralski method; B2. Semiconducting silicon

Indexed keywords

COMPUTER SIMULATION; CONTROL SYSTEM SYNTHESIS; HEAT TRANSFER; MATHEMATICAL MODELS; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH;

ADVANCED CONTROL SYSTEMS;

CRYSTAL GROWTH FROM MELT;

EID: 0035426786     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)01346-X     Document Type: Conference Paper

References (8)

1. Process control