Mechanisms and reactions during atomic layer deposition on polymers

Coordination Chemistry Reviews

Volumn 257, Issue 23-24, 2013, Pages 3323-3331

  Parsons, Gregory N ^a   Atanasov, Sarah E ^a   Dandley, Erinn C ^a   Devine, Christina K ^a   Gong, Bo ^a   Jur, Jesse S ^b   Lee, Kyoungmi ^a   Oldham, Christopher J ^a   Peng, Qing ^a   Spagnola, Joseph C ^a   Williams, Philip S ^a  

^a North Carolina State University   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Al2O3; Atomic layer deposition; Inorganic coatings; Polymers; Thin films

Indexed keywords

EID: 84885481453     PISSN: 00108545     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ccr.2013.07.001     Document Type: Review

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