Diffusion phenomena in atomic layer deposition

Semiconductor Science and Technology

Volumn 27, Issue 7, 2012, Pages

  Knez, Mato ^a,b,c  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b CIC NANOGUNE   (Spain)

^c BASQUE FOUNDATION FOR SCIENCE   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION PHENOMENA; DIFFUSION PROCESS; POST TREATMENT;

DEPOSITION; DIFFUSION;

ATOMIC LAYER DEPOSITION;

EID: 84862744901     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/27/7/074001     Document Type: Article

References (54)

1. Knez M, Nielsch K and Niinistö L 2007 Adv. Mater. 19 3425 (Pubitemid 350134581)
2. Pinna N and Knez M (ed) 2012 Atomic Layer Deposition of Nanostructured Materials (Weinheim, Germany: Wiley-VCH)
3. Puurunen R L 2005 J. Appl. Phys. 97 121301 (Pubitemid 40940570)
4. Jakschik S, Schroeder U, Hecht T, Krueger D, Dollinger G, Bergmaier A, Luhmann C and Bartha J W 2003 Appl. Surf. Sci. 211 352
5. Shulakov A S, Braiko A P, Bukin S V and Drozd V E 2004 Phys. Sol. State 46 1145 (Pubitemid 38883189)
6. Park P K, Cha E S and Kang S W 2007 Appl. Phys. Lett. 90 232906 (Pubitemid 46960304)
7. Kumar S, Greenslit D, Chakraborty T and Eisenbraun E T 2009 J. Vac. Sci. Technol. A 27 572
8. Fan H J, Knez M, Scholz R, Nielsch K, Pippel E, Hesse D, Gösele U and Zacharias M 2006 Nanotechnology 17 5157 (Pubitemid 44523728)
9. Kosola A, Putkonen M, Johansson L S and Niinistö L 2003 Appl. Surf. Sci. 211 102
10. Zolotaryov A, Goetze S, Zierold R, Novikov D, Birajdar B, Hesse D and Nielsch K 2010 Adv. Eng. Mater. 12 509
11. Ginestra C N, Sreenivasan R, Karthikeyan A, Ramanathan S and McIntyre P C 2007 Electrochem. Solid-State Lett. 10 B161 (Pubitemid 47245746)
12. Kirkendall E O 1942 Trans. AIME 147 104
13. Smigelskas A D and Kirkendall E O 1947 Trans. AIME 171 130
14. Fan H J, Gösele U and Zacharias M 2007 Small 3 1660 (Pubitemid 47560677)
15. Yang Y, Yang R B, Fan H J, Scholz R, Huang Z P, Berger A, Qin Y, Knez M and Gosele U 2010 Angew. Chem. Int. Ed. 49 1442
16. Fan H J, Knez M, Scholz R, Nielsch K, Pippel E, Hesse D, Zacharias M and Gösele U 2006 Nat. Mater. 5 627 (Pubitemid 44157679)
17. Güder F, Yang Y, Goetze S, Berger A, Ragmir N, Hesse D and Zacharias M 2010 Small 6 1603
18. Güder F, Yang Y, Danhof J, Hartel A, Schwarz U T and Zacharias M 2011 Appl. Phys. Lett. 99 023105
19. Güder F, Yang Y, Goetze S, Berger A, Scholz R, Hiller D, Hesse D and Zacharias M 2011 Chem. Mater. 23 4445
20. Jang Y W, Bang S, Jeon H and Lee J Y 2011 Phys. Status Solidi B 248 1634
21. Peng Q, Sun X Y, Spagnola J C, Saquing C, Khan S A, Spontak R J and Parsons G N 2010 ACS Nano 3 546
22. Qin Y, Kim Y, Zhang L, Lee S M, Yang R B, Pan A, Mathwig K, Alexe M, Gösele U and Knez M 2010 Small 6 910
23. Yang Y, Kim D S, Knez M, Scholz R, Berger A, Pippel E, Hesse D, Gösele U and Zacharias M 2008 J. Phys. Chem. C 112 4068
24. Yang Y, Kim D S, Scholz R, Knez M, Lee S M, Gösele U and Zacharias M 2008 Chem. Mater. 20 3487
25. Kim D S, Yang Y, Kim H, Berger A, Knez M, Gosele U and Schmidt V 2010 Angew. Chem. Int. Ed. 49 210
26. Yang Y, Kim D S, Qin Y, Berger A, Scholz R, Kim H, Knez M and Gösele U 2010 J. Am. Chem. Soc. 131 13920
27. Huang R and Kitai A H 1992 Appl. Phys. Lett. 61 1450
28. Lee J P, Jang Y J and Sung M M 2003 Adv. Funct. Mater. 13 873
29. Elliott S D and Greer J C 2004 J. Mater. Chem. 14 3246
30. Fu Q and Wagner T 2007 Surf. Sci. Rep. 62 431 (Pubitemid 47615194)
31. Yim S S, Lee M S, Kim K S and Kim K B 2006 Appl. Phys. Lett. 89 093115 (Pubitemid 44319988)
32. Christensen S T et al 2009 Small 5 750
33. Qin Y, Lee S M, Pan A, Gösele U and Knez M 2008 Nano Lett. 8 114 (Pubitemid 351177785)
34. Rossnagel S M, Sherman A and Turner F 2000 J. Vac. Sci. Technol. B 18 2016
35. Park J S, Chae H, Chung H K and Lee S I 2011 Semicond. Sci. Technol. 26 034001
36. Hakim L F, Vaughn C L, Dunsheath H J, Carney C S, Liang X, Li P and Weimer A W 2007 Nanotechnology 18 345603 (Pubitemid 47228449)
37. Qin Y, Liu L, Yang R, Gösele U and Knez M 2008 Nano Lett. 8 3221
38. Qin Y, Yang Y, Scholz R, Pippel E, Lu X and Knez M 2011 Nano Lett. 11 2503
39. Dameron A A, Seghete D, Burton B B, Davidson S D, Cavanagh A S, Bertrand J A and George S M 2008 Chem. Mater. 20 3315
40. Liang X H, Yu M, Li J H, Jiang Y B and Weimer A W 2009 Chem. Commun. 46 7140
41. Wilson C A, Grubbs R K and George S M 2005 Chem. Mater. 17 5625 (Pubitemid 41692215)
42. Spagnola J C, Gong B, Arvidson S A, Jur J S, Khan S A and Parsons G N 2010 J. Mater. Chem. 20 4213
43. Jur J S, Spagnola J C, Lee K, Gong B, Peng Q and Parsons G N 2010 Langmuir 26 8239
44. Gong B, Peng Q, Jur J S, Devine C K, Lee K and Parsons G N 2011 Chem. Mater. 23 3476
45. Kim H C, Park S M and Hinsberg W D 2010 Chem. Rev. 110 146
46. Wang Y, Qin Y, Berger A, Yau E, He C, Zhang L, Gösele U, Knez M and Steinhart M 2009 Adv. Mater. 21 2763
47. Peng Q, Tseng Y C, Darling S B and Elam J W 2010 Adv. Mater. 22 5129
48. Peng Q, Tseng Y C, Darling S B and Elam J W 2011 ACS Nano 5 4600
49. Tseng Y C, Peng Q, Ocola L E, Elam J W and Darling S B 2011 J. Phys. Chem. C 115 17725
50. Chang C Y, Tsai F Y, Jhuo S J and Chen M J 2008 Org. Electron. 9 667
51. Zhang L, Patil A J, Li L, Schierhorn A, Mann S, Gösele U and Knez M 2009 Angew. Chem. Int. Ed. 48 4982
52. Lee S M, Pippel E, Gösele U, Dresbach C, Qin Y, Chandran C V, Bräuniger T, Hause G and Knez M 2009 Science 324 488
53. Lee S M, Pippel E, Moutanabbir O, Gunkel I, Thurn-Albrecht T and Knez M 2010 ACS Appl. Mater. Interf. 2 2436
54. Lee S M, Ischenko V, Pippel E, Masic A, Moutanabbir O, Fratzl P and Knez M 2011 Adv. Funct. Mater. 21 3047