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Volumn 19, Issue 4-6, 2013, Pages 134-141

Influence of subsurface hybrid material growth on the mechanical properties of atomic layer deposited thin films on polymers

(6) Sun, Yujie a Padbury, Richard P a Akyildiz, Halil I a Goertz, Matthew P b Palmer, Jeremy A b Jur, Jesse S a

a NORTH CAROLINA STATE UNIVERSITY (United States)

b SANDIA NATIONAL LABORATORIES (United States)

Author keywords

ALD nucleation; Flexibility; Hybrid layer; Mechanical properties; PA6

Indexed keywords

ATOMIC LAYER DEPOSITED; ATOMIC LAYER DEPOSITION COATINGS; ELECTRONIC DEVICE; FLEXIBILITY; HYBRID LAYER; MECHANICAL PERFORMANCE; PA6; PROCESSING TEMPERATURE;

ALUMINA; ALUMINUM COATINGS; DEPOSITION; FUNCTIONAL MATERIALS; HYBRID MATERIALS; MECHANICAL PROPERTIES; PLASTIC COATINGS; POLYMERS; THIN FILMS;

ATOMIC LAYER DEPOSITION;

EID: 84879196510 PISSN: 09481907 EISSN: 15213862 Source Type: Journal
DOI: 10.1002/cvde.201207042 Document Type: Article

Times cited : (42)

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