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Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 710, Issue , 2013, Pages 78-81

At-wavelength metrology using the moiré fringe analysis method based on a two dimensional grating interferometer

(6) Wang, Hongchang a Berujon, Sebastien a,b Pape, Ian a Rutishauser, Simon c David, Christian c Sawhney, Kawal a

a DIAMOND LIGHT SOURCE LTD (United Kingdom)

b EUROPEAN SYNCHROTRON RADIATION FACILITY (France)

c PAUL SCHERRER INSTITUTE (Switzerland)

Author keywords

At wavelength; FFT; Metrology; Synchrotron radiation; Two dimensional grating interferometer; X ray

Indexed keywords

FAST FOURIER TRANSFORMS; INTERFEROMETERS; MEASUREMENTS; SYNCHROTRON RADIATION; WAVEFRONTS; X RAYS;

AT-WAVELENGTH METROLOGIES; BOUNDARY ARTIFACTS; ORTHOGONAL DIRECTIONS; PHASE-STEPPING METHOD; SHEARING INTERFEROMETER; TWO-DIMENSIONAL (2D) GRATINGS; TWO-DIMENSIONAL GRATING; WAVEFRONT METROLOGY;

UNITS OF MEASUREMENT;

EID: 84885385132 PISSN: 01689002 EISSN: None Source Type: Journal
DOI: 10.1016/j.nima.2012.10.096 Document Type: Article

Times cited : (6)

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