Metallic conduction behavior in selenium-hyperdoped silicon

Materials Science in Semiconductor Processing

Volumn 17, Issue , 2014, Pages 134-137

  Hu, Shaoxu ^a   Han, Peide ^a   Liang, Peng ^a   Xing, Yupeng ^a   Lou, Shishu ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

Ion implantation; Metallic conduction; Selenium supersaturation; Silicon

Indexed keywords

CRYSTALLINE SILICONS; FREE CARRIER DENSITY; FURNACE ANNEALING; HALL MEASUREMENTS; IMPLANTATION DOSE; METALLIC CONDUCTION; SOLID SOLUBILITIES; TEMPERATURE DEPENDENCE;

ION IMPLANTATION; SILICON;

SELENIUM;

EID: 84885334537     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2013.09.001     Document Type: Article

References (35)

1. C. Wu, C.H. Crouch, L. Zhao, J.E. Carey, R. Younkin, J.A. Levinson, E. Mazur, R.M. Farrell, P. Gothoskar, A. Karger, Applied Physics Letters 78 (2001) 1850
2. C.H. Crouch, J.E. Carey, J.M. Warrender, M. J. Aziz, E. Mazur, F. Y. Genin, Applied Physics Letters 84 (2004) 1850.
3. C. H. Crouch, J. E. Carey, M. Shen, E. Mazur, F. Y. Genin, Applied Physics A 79 (2004) 1635.
4. M.A. Sheehy, L. Winston, J.E. Carey, C.M. Friend, and E. Mazur Chemistry of Materials 17 2005 3582
5. T.G. Kim, J.M. Warrender, and M.J. Aziz Applied Physics Letters 88 2006 241902
6. V. Zorba, N. Boukos, I. Zergioti, and C. Fotakis Applied Optics 47 2008 1846
7. B.P. Bob, A. Kohno, S. Charnvanichborikarn, J.M. Warrender, I. Umezu, M. Tabbal, J.S. Williams, and M.J. Aziz Journal of Applied Physics 107 2010 123506
8. M. Tabbal, T. Kim, D.N. Woolf, B. Shin, and M.J. Aziz Applied Physics A 98 2010 589
9. S.H. Pan, D. Recht, S. Charnvanichborikarn, J.S. Williams, and M.J. Aziz Applied Physics Letters 98 2011 121913
10. M.J. Smith, M. Winkler, M.J. Sher, Y.T. Lin, E. Mazur, and S. Gradecak Applied Physics A 105 2011 795
11. J. E. Carey, C. H. Crouch, M. Shen, E. Mazur, Optics Letters 30 (2005) 1773.
12. Z. Huang, J.E. Carey, M. Liu, X. Guo, E. Mazur, and J.C. Campbell Applied Physics Letters 89 2006 033506
13. R.A. Myers, R. Farrell, A.M. Karger, J.E. Carey, and E. Mazur Applied Optics 45 2006 8825
14. A.J. Said, D. Recht, J.T. Sullivan, J.M. Warrender, T. Buonassisi, P.D. Persans, and M.J. Aziz Applied Physics Letters 99 2011 073503
15. S. Hu, P. Han, S. Wang, X. Mao, X. Li, and L. Gao Semiconductor Science and Technology 27 2012 102002
16. L. Cuadra, A. Marti, and A. Luque IEEE Transactions on Electron Devices 51 2004 1002
17. V.V. Iyengar, B.K. Nayak, and M.C. Gupta Solar Energy Materials and Solar Cells 94 2010 2251
18. M.J. Sher, M.T. Winkler, and E. Mazur Materials Research Bulletin 36 2011 439
19. M.T. Winkler, D. Recht, M.J. Sher, A.J. Said, E. Mazur, and M.J. Aziz Physical Review Letters 106 2011 178701
20. X. Li, P. Han, L. Gao, X. Mao, and S. Hu Applied Physics A 105 2011 1021
21. E. Ertekin, M.T. Winkler, D. Recht, A.J. Said, M.J. Aziz, T. Buonassisi, and J.C. Grossman Physical Review Letters 108 2012 026401
22. C. Yamanouchi, K. Mizuguchi, and W. Sasaki Journal of Physical Society of Japan 22 1967 859
23. T.F. Rosenbaum, R.F. Milligan, M.A. Paalanen, G.A. Thomas, R.N. Bhatt, and W. Lin Physical Review B 27 1983 7509
24. M.N. Alexander, and D.F. Holcomb Reviews of Modern Physics 40 1968 815
25. T. G. Castner, N. K. Lee, G. S. Cieloszyk, G. L. Salinger, Physical Review Letters 34 (1975) 1627.
26. N.F. Mott Reviews of Modern Physics 40 1968 677
27. J.F. Ziegler, M.D. Ziegler, and J.P. Biersack Nuclear Instruments and Methods in Physics Research B 268 2010 1818
28. A.A. Taskin, B.A. Zaitsev, V.I. Obodnikov, and E.G. Tishkovskii Semiconductors 34 2000 312
29. S. Liu, W. Lu, C. Ji, T. Chang, A study of the laser and thermal annealing behavior by Rutherford backscattering, in: The 4th International Conference on Ion Beam Analysis, June 25-29, 1979.
30. S. Hu, P. Han, Y. Mi, Y. Xing, P. Liang, and Y. Fan Materials Science in Semiconductor Processing 16 2013 987
31. E. Janzen, R. Stedman, G. Grossmann, H. G. Grimmeiss, Physical Review B 29 (1984) 1907.
32. L. Gao, P. Han, X. Mao, Y. Fan, S. Hu, C. Zhao, and Y. Mi Chinese Physics Letters 28 2011 036108
33. P.P. Edwards, and M.J. Sienko Physical Review B 17 1978 2575
34. H.R. Vydyanath, J.S. Lorenzo, and F.A. Kroger Journal of Applied Physics 49 1978 5928
35. G.A. Thomas, M. Capizzi, F. Derosa, R.N. Bhatt, and T.M. Rice Physical Review B 23 1981 5472