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Volumn 107, Issue 12, 2010, Pages

Fabrication and subband gap optical properties of silicon supersaturated with chalcogens by ion implantation and pulsed laser melting

(8) Bob, Brion P a Kohno, Atsushi a,b Charnvanichborikarn, Supakit c Warrender, Jeffrey M d Umezu, Ikurou a,e Tabbal, Malek f Williams, James S c Aziz, Michael J a

a HARVARD UNIVERSITY (United States)

b FUKUOKA UNIVERSITY (Japan)

c AUSTRALIAN NATIONAL UNIVERSITY (Australia)

d Benet Laboratories (United States)

e KONAN UNIVERSITY (Japan)

f AMERICAN UNIVERSITY OF BEIRUT (Lebanon)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC CONCENTRATION; CHALCOGENS; ELECTRONIC CARRIERS; LASER SHOTS; LIQUID-PHASE DIFFUSION; ONE-DIMENSIONAL MODEL; PULSED LASER; SINGLE CRYSTAL SILICON; SOLUTE TRAPPING; SPREADING RESISTANCE PROFILING; SUBBAND GAP ABSORPTION; SUBBAND-GAP; SURFACE EVAPORATION; WAVELENGTH RANGES;

ABSORPTION; CARRIER CONCENTRATION; CRYSTALLIZATION; DEPTH PROFILING; ION IMPLANTATION; MELTING; OPTICAL PROPERTIES; PULSED LASER APPLICATIONS; RAPID SOLIDIFICATION; SECONDARY ION MASS SPECTROMETRY; SILICON WAFERS; SINGLE CRYSTALS; TELLURIUM COMPOUNDS;

PULSED LASERS;

EID: 77954184540 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3415544 Document Type: Article

Times cited : (106)

References (16)

1
- 0035952881
- APPLAB 0003-6951. 10.1063/1.1358846
- C. Wu, C. H. Crouch, L. Zhao, J. E. Carey, R. Younkin, J. A. Levinson, E. Mazur, R. M. Farrell, P. Gothoskar, and A. Karger, Appl. Phys. Lett. APPLAB 0003-6951 78, 1850 (2001). 10.1063/1.1358846
- (2001) Appl. Phys. Lett. , vol.78 , pp. 1850
- Wu, C.¹ Crouch, C.H.² Zhao, L.³ Carey, J.E.⁴ Younkin, R.⁵ Levinson, J.A.⁶ Mazur, E.⁷ Farrell, R.M.⁸ Gothoskar, P.⁹ Karger, A.¹⁰

2
- 1842637319
- APPLAB 0003-6951. 10.1063/1.1667004
- C. H. Crouch, J. E. Carey, J. M. Warrender, E. Mazur, M. J. Aziz, and F. Genin, Appl. Phys. Lett. APPLAB 0003-6951 84, 1850 (2004). 10.1063/1.1667004
- (2004) Appl. Phys. Lett. , vol.84 , pp. 1850
- Crouch, C.H.¹ Carey, J.E.² Warrender, J.M.³ Mazur, E.⁴ Aziz, M.J.⁵ Genin, F.⁶

3
- 23144463140
- OPLEDP 0146-9592. 10.1364/OL.30.001773
- J. E. Carey, C. H. Crouch, M. A. Sheehy, M. Shen, C. M. Friend, and E. Mazur, Opt. Lett. OPLEDP 0146-9592 30, 1773 (2005). 10.1364/OL.30.001773
- (2005) Opt. Lett. , vol.30 , pp. 1773
- Carey, J.E.¹ Crouch, C.H.² Sheehy, M.A.³ Shen, M.⁴ Friend, C.M.⁵ Mazur, E.⁶

4
- 22944436780
- Role of the background gas in the morphology and optical properties of laser-microstructured silicon
- DOI 10.1021/cm049029i
- M. A. Sheehy, L. Winston, J. E. Carey, C. M. Friend, and E. Mazur, Chem. Mater. CMATEX 0897-4756 17, 3582 (2005). 10.1021/cm049029i (Pubitemid 41048792)
- (2005) Chemistry of Materials , vol.17 , Issue.14 , pp. 3582-3586
- Sheehy, M.A.¹ Winston, L.² Carey, J.E.³ Friend, C.M.⁴ Mazur, E.⁵

5
- 33745183573
- APPLAB 0003-6951. 10.1063/1.2212051
- T. G. Kim, J. M. Warrender, and M. J. Aziz, Appl. Phys. Lett. APPLAB 0003-6951 88, 241902 (2006). 10.1063/1.2212051
- (2006) Appl. Phys. Lett. , vol.88 , pp. 241902
- Kim, T.G.¹ Warrender, J.M.² Aziz, M.J.³

6
- 37149000629
- Formation of single crystal sulfur supersaturated silicon based junctions by pulsed laser melting
- DOI 10.1116/1.2796184
- M. Tabbal, T. Kim, J. M. Warrender, M. J. Aziz, B. L. Cardozo, and R. S. Goldman, J. Vac. Sci. Technol. B JVTBD9 1071-1023 25, 1847 (2007). 10.1116/1.2796184 (Pubitemid 350255803)
- (2007) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.25 , Issue.6 , pp. 1847-1852
- Tabbal, M.¹ Kim, T.² Warrender, J.M.³ Aziz, M.J.⁴ Cardozo, B.L.⁵ Goldman, R.S.⁶

7
- 33846849157
- Chalcogen doping of silicon via intense femtosecond-laser irradiation
- DOI 10.1016/j.mseb.2006.10.002, PII S092151070600599X
- M. A. Sheehy, B. R. Tull, C. M. Friend, and E. Mazur, Mater. Sci. Eng., B MSBTEK 0921-5107 137, 289 (2007). 10.1016/j.mseb.2006.10.002 (Pubitemid 46205186)
- (2007) Materials Science and Engineering B: Solid-State Materials for Advanced Technology , vol.137 , Issue.1-3 , pp. 289-294
- Sheehy, M.A.¹ Tull, B.R.² Friend, C.M.³ Mazur, E.⁴

8
- 0008480628
- edited by V. T. Nguyen and A. G. Cullis (Editions de Physique, Paris)
- M. J. Aziz, C. W. White, J. Narayan, and B. Stritzker, in Energy Beam-Solid Interactions and Transient Thermal Processing, edited by, V. T. Nguyen, and, A. G. Cullis, (Editions de Physique, Paris, 1985), p. 231-236.
- (1985) Energy Beam-Solid Interactions and Transient Thermal Processing , pp. 231-236
- Aziz, M.J.¹ White, C.W.² Narayan, J.³ Stritzker, B.⁴

9
- 0028491315
- JAPIAU 0021-8979. 10.1063/1.357728
- R. Reitano, P. M. Smith, and M. J. Aziz, J. Appl. Phys. JAPIAU 0021-8979 76, 1518 (1994). 10.1063/1.357728
- (1994) J. Appl. Phys. , vol.76 , pp. 1518
- Reitano, R.¹ Smith, P.M.² Aziz, M.J.³

10
- 0004040706
- edited by, by E. D. Palik, (Academic, New York)
- Handbook of Optical Constants of Solids, edited by, by, E. D. Palik, (Academic, New York, 1985).
- (1985) Handbook of Optical Constants of Solids

11
- 84879360754
- edited by K. D. Meyer and S. Biesemans (Springer, Leuven)
- G. Kaiblinger-Grujin, T. Grasser, and S. Selberherr, in Simulation of Semiconductor Processes and Devices, edited by, K. D. Meyer, and, S. Biesemans, (Springer, Leuven, 1998), p. 312-215.
- (1998) Simulation of Semiconductor Processes and Devices , pp. 312-215
- Kaiblinger-Grujin, G.¹ Grasser, T.² Selberherr, S.³

12
- 0342440887
- PRBMDO 0163-1829. 10.1103/PhysRevB.58.189
- D. E. Hoglund, M. O. Thompson, and M. J. Aziz, Phys. Rev. B PRBMDO 0163-1829 58, 189 (1998). 10.1103/PhysRevB.58.189
- (1998) Phys. Rev. B , vol.58 , pp. 189
- Hoglund, D.E.¹ Thompson, M.O.² Aziz, M.J.³

13
- 58149217972
- JAPIAU 0021-8979. 10.1063/1.3041154
- T. Kim, K. Alberi, O. D. Dubon, M. J. Aziz, and V. Narayanamurti, J. Appl. Phys. JAPIAU 0021-8979 104, 113722 (2008). 10.1063/1.3041154
- (2008) J. Appl. Phys. , vol.104 , pp. 113722
- Kim, T.¹ Alberi, K.² Dubon, O.D.³ Aziz, M.J.⁴ Narayanamurti, V.⁵

14
- 77954197700
- (unpublished)
- I. Umezu, S. Charnvanichborikarn, A. Kohno, J. M. Warrender, J. S. Williams, M. J. Aziz, M. Tabbal, D. Papazoglou, Y. Chen, and X. -C. Zhang (unpublished).
- Umezu, I.¹ Charnvanichborikarn, S.² Kohno, A.³ Warrender, J.M.⁴ Williams, J.S.⁵ Aziz, M.J.⁶ Tabbal, M.⁷ Papazoglou, D.⁸ Chen, Y.⁹ Zhang, X.-C.¹⁰

15
- 36549099596
- APPLAB 0003-6951. 10.1063/1.98562
- T. G. Brown, P. L. Bradfield, and D. G. Hall, Appl. Phys. Lett. APPLAB 0003-6951 51, 1585 (1987). 10.1063/1.98562
- (1987) Appl. Phys. Lett. , vol.51 , pp. 1585
- Brown, T.G.¹ Bradfield, P.L.² Hall, D.G.³

16
- 0000914717
- APPLAB 0003-6951. 10.1063/1.97183
- T. G. Brown and D. G. Hall, Appl. Phys. Lett. APPLAB 0003-6951 49, 245 (1986). 10.1063/1.97183
- (1986) Appl. Phys. Lett. , vol.49 , pp. 245
- Brown, T.G.¹ Hall, D.G.²

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