SCOPUS 정보 검색 플랫폼

Volumn 546, Issue , 2013, Pages 153-156

Gas diffusion barrier characteristics of Al2O 3/alucone films formed using trimethylaluminum, water and ethylene glycol for organic light emitting diode encapsulation

(6) Park, Minwoo a Oh, Seungsik a Kim, Hoonbae a Jung, Donggeun a Choi, Dongwon b Park, Jin Seong b

a Sungkyunkwan University (South Korea)

b Hanyang University (South Korea)

Author keywords

Barrier films; Molecular layer deposition alucone films; Water vapor transmission rate

Indexed keywords

ALUMINUM; ATOMIC LAYER DEPOSITION; CHEMICAL BONDS; DEPOSITION; DIFFUSION; DIFFUSION BARRIERS; ETHYLENE; ETHYLENE GLYCOL; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT EMITTING DIODES; ORGANIC LIGHT EMITTING DIODES (OLED); SELF ASSEMBLY; WATER VAPOR;

BARRIER FILMS; CHEMICAL BONDING STATE; MOLECULAR LAYER DEPOSITION; POLYETHYLENE NAPHTHALATE; TRIMETHYLALUMINUM; VAPOR DIFFUSION; WATER VAPOR DIFFUSION; WATER VAPOR TRANSMISSION RATE;

GAS PERMEABLE MEMBRANES;

EID: 84885292350 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.05.017 Document Type: Conference Paper

Times cited : (51)

References (32)

1
- 79951920897
- J. Park, H. Chae, H.K. Chung, S.I. Lee, Semicond. Sci. Technol. 26 (2011) 034001.
- (2011) Semicond. Sci. Technol. , vol.26 , pp. 034001
- Park, J.¹ Chae, H.² Chung, H.K.³ Lee, S.I.⁴

2
- 33746804964
- S.J. Bae, J.W. Lee, J.S. Park, D.Y. Kim, S.W. Hwang, J.K. Kim, B.K. Ju, Jpn. J. Appl. Phys. 45 (2006) 5970.
- (2006) Jpn. J. Appl. Phys. , vol.45 , pp. 5970
- Bae, S.J.¹ Lee, J.W.² Park, J.S.³ Kim, D.Y.⁴ Hwang, S.W.⁵ Kim, J.K.⁶ Ju, B.K.⁷

3
- 79956026614
- M. Weaver, L. Michalski, K. Rajan, M. Rothman, J. Silvernail, J. Brown, P. Burrows, G. Graff, M. Gross, P. Martin, M. Hall, E. Mast, C. Bonham, W. Bennett, M. Zumhoff, Appl. Phys. Lett. 81 (2002) 2929.
- (2002) Appl. Phys. Lett. , vol.81 , pp. 2929
- Weaver, M.¹ Michalski, L.² Rajan, K.³ Rothman, M.⁴ Silvernail, J.⁵ Brown, J.⁶ Burrows, P.⁷ Graff, G.⁸ Gross, M.⁹ Martin, P.¹⁰ Hall, M.¹¹ Mast, E.¹² Bonham, C.¹³ Bennett, W.¹⁴ Zumhoff, M.¹⁵

4
- 2442707992
- J. Lewis, M. Weaver, IEEE J. Sel. Top. Quantum Electron. 10 (2004) 45.
- (2004) IEEE J. Sel. Top. Quantum Electron. , vol.10 , pp. 45
- Lewis, J.¹ Weaver, M.²

5
- 0035297946
- M. Schaer, F. Nuesch, D. Berner, W. Leo, L. Zuppiroli, Adv. Funct. Mater. 11 (2001) 116.
- (2001) Adv. Funct. Mater. , vol.11 , pp. 116
- Schaer, M.¹ Nuesch, F.² Berner, D.³ Leo, W.⁴ Zuppiroli, L.⁵

6
- 20844455247
- A. Ghosh, L. Gerenser, C. Jarman, J. Fornalik, Appl. Phys. Lett. 86 (2005) 223503.
- (2005) Appl. Phys. Lett. , vol.86 , pp. 223503
- Ghosh, A.¹ Gerenser, L.² Jarman, C.³ Fornalik, J.⁴

7
- 78751649021
- Y. Liao, F. Yu, L. Long, B. Wei, L. Lu, J. Zhang, Thin Solid Films 519 (2011) 2344.
- (2011) Thin Solid Films , vol.519 , pp. 2344
- Liao, Y.¹ Yu, F.² Long, L.³ Wei, B.⁴ Lu, L.⁵ Zhang, J.⁶

8
- 66749120161
- J. Meyer, P. Goerrn, F. Bertram, S. Hamwi, T. Winkler, H. Johannes, T. Weimann, P. Hinze, T. Riedl, W. Kowalsky, Adv. Mater. 21 (2009) 1845.
- (2009) Adv. Mater. , vol.21 , pp. 1845
- Meyer, J.¹ Goerrn, P.² Bertram, F.³ Hamwi, S.⁴ Winkler, T.⁵ Johannes, H.⁶ Weimann, T.⁷ Hinze, P.⁸ Riedl, T.⁹ Kowalsky, W.¹⁰

9
- 77953730270
- J. Meyer, H. Schmidt, W. Kowalsky, T. Riedl, A. Kahn, Appl. Phys. Lett. 96 (2010) 243308.
- (2010) Appl. Phys. Lett. , vol.96 , pp. 243308
- Meyer, J.¹ Schmidt, H.² Kowalsky, W.³ Riedl, T.⁴ Kahn, A.⁵

10
- 55849136902
- W. Kim, M. Ko, T. Kim, S. Park, Y. Moon, S. Lee, J. Park, J. Park, J. Nanosci. Nanotechnol. 8 (2008) 4726.
- (2008) J. Nanosci. Nanotechnol. , vol.8 , pp. 4726
- Kim, W.¹ Ko, M.² Kim, T.³ Park, S.⁴ Moon, Y.⁵ Lee, S.⁶ Park, J.⁷ Park, J.⁸

11
- 47049095504
- A.A. Dameron, S.D. Davidson, B.B. Burton, P.F. Carcia, R.S. McLean, S.M. George, J. Phys. Chem. C 112 (2008) 4573.
- (2008) J. Phys. Chem. C , vol.112 , pp. 4573
- Dameron, A.A.¹ Davidson, S.D.² Burton, B.B.³ Carcia, P.F.⁴ McLean, R.S.⁵ George, S.M.⁶

12
- 84867557177
- D. Choi, S. Kim, J.H. Lee, K. Chung, J. Park, Curr. Appl. Phys. 12 (2012) S19.
- (2012) Curr. Appl. Phys. , vol.12
- Choi, D.¹ Kim, S.² Lee, J.H.³ Chung, K.⁴ Park, J.⁵

13
- 31944446945
- M. Groner, S. George, R. McLean, P. Carcia, Appl. Phys. Lett. 88 (2006) 051907.
- (2006) Appl. Phys. Lett. , vol.88 , pp. 051907
- Groner, M.¹ George, S.² McLean, R.³ Carcia, P.⁴

14
- 33746306730
- P.F. Carcia, R.S. McLean, M.H. Reilly, M.D. Groner, S.M. George, Appl. Phys. Lett. 89 (2006) 031915.
- (2006) Appl. Phys. Lett. , vol.89 , pp. 031915
- Carcia, P.F.¹ McLean, R.S.² Reilly, M.H.³ Groner, M.D.⁴ George, S.M.⁵

15
- 0043128739
- A. Chwang, M. Rothman, S. Mao, R. Hewitt, M. Weaver, J. Silvernail, K. Rajan, M. Hack, J. Brown, X. Chu, L. Moro, T. Krajewski, N. Rutherford, Appl. Phys. Lett. 83 (2003) 413.
- (2003) Appl. Phys. Lett. , vol.83 , pp. 413
- Chwang, A.¹ Rothman, M.² Mao, S.³ Hewitt, R.⁴ Weaver, M.⁵ Silvernail, J.⁶ Rajan, K.⁷ Hack, M.⁸ Brown, J.⁹ Chu, X.¹⁰ Moro, L.¹¹ Krajewski, T.¹² Rutherford, N.¹³

16
- 0030386041
- J. Affinito, M. Gross, C. Coronado, G. Graff, E. Greenwell, P. Martin, Thin Solid Films 290 (1996) 63.
- (1996) Thin Solid Films , vol.290 , pp. 63
- Affinito, J.¹ Gross, M.² Coronado, C.³ Graff, G.⁴ Greenwell, E.⁵ Martin, P.⁶

17
- 35948937176
- J. Greener, K.C. Ng, K.M. Vaeth, T.M. Smith, J. Appl. Polym. Sci. 106 (2007) 3534.
- (2007) J. Appl. Polym. Sci. , vol.106 , pp. 3534
- Greener, J.¹ Ng, K.C.² Vaeth, K.M.³ Smith, T.M.⁴

18
- 75649140552
- S.M. George, Chem. Rev. 110 (2010) 111.
- (2010) Chem. Rev. , vol.110 , pp. 111
- George, S.M.¹

19
- 45749115744
- A.A. Dameron, D. Seghete, B.B. Burton, S.D. Davidson, A.S. Cavanagh, J.A. Bertrand, S.M. George, Chem. Mater. 20 (2008) 3315.
- (2008) Chem. Mater. , vol.20 , pp. 3315
- Dameron, A.A.¹ Seghete, D.² Burton, B.B.³ Davidson, S.D.⁴ Cavanagh, A.S.⁵ Bertrand, J.A.⁶ George, S.M.⁷

20
- 84871857250
- J.A. Bertrand, S.M. George, J. Vac, Sci. Technol. A 31 (2013) 01A122.
- (2013) Sci. Technol. A , vol.31
- Bertrand, J.A.¹ George, S.M.² Vac, J.³

21
- 30244553914
- E.M. Cordi, J.L. Flaconer, Appl. Catal. A Gen. 151 (1997) 179.
- (1997) Appl. Catal. A Gen. , vol.151 , pp. 179
- Cordi, E.M.¹ Flaconer, J.L.²

22
- 0037094023
- G. Fisher, A. Walker, A. Hooper, T. Tighe, K. Bahnck, H. Skriba, M. Reinard, B. Haynie, R. Opila, N. Winograd, D. Allara, J. Am. Chem. Soc. 124 (2002) 5528.
- (2002) J. Am. Chem. Soc. , vol.124 , pp. 5528
- Fisher, G.¹ Walker, A.² Hooper, A.³ Tighe, T.⁴ Bahnck, K.⁵ Skriba, H.⁶ Reinard, M.⁷ Haynie, B.⁸ Opila, R.⁹ Winograd, N.¹⁰ Allara, D.¹¹

23
- 0035922872
- M. Frank, K. Wolter, N. Magg, M. Heemeier, R. Kuhnemuth, M. Baumer, H. Freund, Surf. Sci. 492 (2001) 270.
- (2001) Surf. Sci. , vol.492 , pp. 270
- Frank, M.¹ Wolter, K.² Magg, N.³ Heemeier, M.⁴ Kuhnemuth, R.⁵ Baumer, M.⁶ Freund, H.⁷

24
- 0029388124
- H. Liu, D. Bertolet, J. Rogers, Surf. Sci. 340 (1995) 88.
- (1995) Surf. Sci. , vol.340 , pp. 88
- Liu, H.¹ Bertolet, D.² Rogers, J.³

25
- 34547541744
- J. Soria, J. Sanz, I. Sobrados, J.M. Coronado, A.J. Maira, M.D. Hernandez-Alonso, F. Fresno, J. Phys. Chem. C 111 (2007) 10590.
- (2007) J. Phys. Chem. C , vol.111 , pp. 10590
- Soria, J.¹ Sanz, J.² Sobrados, I.³ Coronado, J.M.⁴ Maira, A.J.⁵ Hernandez-Alonso, M.D.⁶ Fresno, F.⁷

26
- 0030034052
- S. deMiguel, A. Martinez, A. Castro, O. Scelza, J. Chem. Technol. Biotechnol. 65 (1996) 131.
- (1996) J. Chem. Technol. Biotechnol. , vol.65 , pp. 131
- Demiguel, S.¹ Martinez, A.² Castro, A.³ Scelza, O.⁴

27
- 28444461731
- N. Makgoba, T. Sakuneka, J. Koortzen, C. van Schalkwyk, J. Botha, C. Nicolaides, Appl. Catal. A Gen. 297 (2006) 145.
- (2006) Appl. Catal. A Gen. , vol.297 , pp. 145
- Makgoba, N.¹ Sakuneka, T.² Koortzen, J.³ Van Schalkwyk, C.⁴ Botha, J.⁵ Nicolaides, C.⁶

28
- 0031095827
- Y. Tropsha, N. Harvey, J. Phys. Chem. B 101 (1997) 2259.
- (1997) J. Phys. Chem. B , vol.101 , pp. 2259
- Tropsha, Y.¹ Harvey, N.²

29
- 0346306090
- R. Paetzold, A. Winnacker, D. Henseler, V. Cesari, K. Heuser, Rev. Sci. Instrum. 74 (2003) 5147.
- (2003) Rev. Sci. Instrum. , vol.74 , pp. 5147
- Paetzold, R.¹ Winnacker, A.² Henseler, D.³ Cesari, V.⁴ Heuser, K.⁵

30
- 34547289877
- J.H. Choi, Y.M. Kim, Y.W. Park, J.W. Huh, B.K. Ju, I.S. Kim, H.N. Hwang, Rev. Sci. Instrum. 78 (2007) 064701.
- (2007) Rev. Sci. Instrum. , vol.78 , pp. 064701
- Choi, J.H.¹ Kim, Y.M.² Park, Y.W.³ Huh, J.W.⁴ Ju, B.K.⁵ Kim, I.S.⁶ Hwang, H.N.⁷

31
- 84864742313
- S. Seo, E. Jung, C. Lim, H. Chae, S.M. Cho, Thin Solid Films 520 (2012) 6690.
- (2012) Thin Solid Films , vol.520 , pp. 6690
- Seo, S.¹ Jung, E.² Lim, C.³ Chae, H.⁴ Cho, S.M.⁵

32
- 84864697913
- M. Vähä-Nissi, P. Sundberg, E. Kauppi, T. Hirvikorpi, J. Sievänen, A. Sood, M. Karppinen, A. Harlin, Thin Solid Films 520 (2012) 6780.
- (2012) Thin Solid Films , vol.520 , pp. 6780
- Vähä-Nissi, M.¹ Sundberg, P.² Kauppi, E.³ Hirvikorpi, T.⁴ Sievänen, J.⁵ Sood, A.⁶ Karppinen, M.⁷ Harlin, A.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.