SCOPUS 정보 검색 플랫폼

Journal of Nanoscience and Nanotechnology

Volumn 8, Issue 9, 2008, Pages 4726-4729

Titanium dioxide thin films deposited by plasma enhanced atomic layer deposition for OLED passivation

(8) Kim, Woong Sun a Ko, Myoung Gyun a Kim, Tae Sub a Park, Sang Kyun a Moon, Yeon Keon a Lee, Su Hwan a Park, Jae Gun a Park, Jong Wan a

a Hanyang University (South Korea)

Author keywords

Organic Light Emitting Diode (OLED); Passivation film; Plasma Enhanced Atomic Layer Deposition (PEALD); Titanium dioxide; Water Vapor Transmission Rate (WVTR)

Indexed keywords

ATOMIC LAYERS; DEPOSITION TEMPERATURES; LIFE-TIMES; LIGHT EMITTING DIODE LEDS; ORGANIC LIGHT-EMITTING DIODE (OLED); OXYGEN PLASMAS; PASSIVATION FILM; PASSIVATION PROPERTIES; PLASMA POWERS; TETRAKIS; TITANIUM DIOXIDE FILMS; TITANIUM DIOXIDE THIN FILMS; WATER VAPOR TRANSMISSION RATE (WVTR); WATER VAPOR TRANSMISSION RATES;

ATOMIC PHYSICS; ATOMS; DEPOSITION; FILM GROWTH; HELMET MOUNTED DISPLAYS; LIGHT EMISSION; LIGHT EMITTING DIODES; ORGANIC LIGHT EMITTING DIODES (OLED); OXIDES; OXYGEN; PASSIVATION; PLASMA DEPOSITION; PLASMA DIAGNOSTICS; PLASMAS; PULSED LASER DEPOSITION; THICK FILMS; THIN FILMS; TITANIUM; TITANIUM DIOXIDE; VAPOR DEPOSITION; VAPORS; WATER VAPOR;

ATOMIC LAYER DEPOSITION;

EID: 55849136902 PISSN: 15334880 EISSN: None Source Type: Journal
DOI: 10.1166/jnn.2008.IC48 Document Type: Conference Paper

Times cited : (27)

References (13)

1
- 21544459113
- C. W. Tang and S. A. VanSlyke, Appl. Phys. Lett. 51, 913 (1987).
- (1987) Appl. Phys. Lett , vol.51 , pp. 913
- Tang, C.W.¹ VanSlyke, S.A.²

2
- 21544436078
- P. E. Burrows, V. Bulovic, S. R. Forrest, L. S. Sapochak, D. M. McCarty, and M. E. Thompson, Appl. Phys. Lett. 65, 2922 (1994).
- (1994) Appl. Phys. Lett , vol.65 , pp. 2922
- Burrows, P.E.¹ Bulovic, V.² Forrest, S.R.³ Sapochak, L.S.⁴ McCarty, D.M.⁵ Thompson, M.E.⁶

3
- 0038705111
- P. E. Burrows, G. L. Graff, M. E. Gross, P. M. Martin, M. Hall, E. Mast, C. Bonham, W. Bennet, L. Michalski, M. S. Weaver, J. J. Brown, D. Fogarty, and L. S. Sapochak, Proc. SPIE (2000), Vol. 4105, p. 75.
- (2000) Proc. SPIE , vol.4105 , pp. 75
- Burrows, P.E.¹ Graff, G.L.² Gross, M.E.³ Martin, P.M.⁴ Hall, M.⁵ Mast, E.⁶ Bonham, C.⁷ Bennet, W.⁸ Michalski, L.⁹ Weaver, M.S.¹⁰ Brown, J.J.¹¹ Fogarty, D.¹² Sapochak, L.S.¹³

4
- 55849104672
- A. Yoshida, S. Fujimura, T. Miyake, T. Yoshizawa, H. Ochi, A. Sugimoto, H. Kubota, T. Miyadera, S. Ishizuka, M. Tsuchida, and H. Nakada, Proc. SID (2003), p. 856.
- (2003) Proc. SID , pp. 856
- Yoshida, A.¹ Fujimura, S.² Miyake, T.³ Yoshizawa, T.⁴ Ochi, H.⁵ Sugimoto, A.⁶ Kubota, H.⁷ Miyadera, T.⁸ Ishizuka, S.⁹ Tsuchida, M.¹⁰ Nakada, H.¹¹

5
- 0043128739
- A. B. Chwang, M. A. Rothman, S. Y. Mao, R. H. Hewitt, M. S. Weaver, J. A. Silvernail, K. Rajan, M. Hack, J. J. Brown, X. Chu, L. Moro, T. Krajewski, and N. Rutherford, Appl. Phys. Lett. 83, 413 (2003).
- (2003) Appl. Phys. Lett , vol.83 , pp. 413
- Chwang, A.B.¹ Rothman, M.A.² Mao, S.Y.³ Hewitt, R.H.⁴ Weaver, M.S.⁵ Silvernail, J.A.⁶ Rajan, K.⁷ Hack, M.⁸ Brown, J.J.⁹ Chu, X.¹⁰ Moro, L.¹¹ Krajewski, T.¹² Rutherford, N.¹³

6
- 0742286779
- A. G. Erlat, B. M. Henry, C. R. M. Grovenor, A. G. D. Briggs, R. J. Carter, and Y. Tsukahara, J. Phys. Chem. B 108, 883 (2004).
- (2004) J. Phys. Chem. B , vol.108 , pp. 883
- Erlat, A.G.¹ Henry, B.M.² Grovenor, C.R.M.³ Briggs, A.G.D.⁴ Carter, R.J.⁵ Tsukahara, Y.⁶

7
- 2442711632
- K. H. Kim, H. Kim, H. M. Koo, J. K. Kim, Y. C. Kim, J. I. Han, D. G. Moon, J. Jang, and B. K. Ju, SID 03 DIGEST 34, 563 (2003).
- (2003) SID 03 DIGEST , vol.34 , pp. 563
- Kim, K.H.¹ Kim, H.² Koo, H.M.³ Kim, J.K.⁴ Kim, Y.C.⁵ Han, J.I.⁶ Moon, D.G.⁷ Jang, J.⁸ Ju, B.K.⁹

8
- 19144373173
- S. J. Yun, Y. W. Ko, and J. W. Lim, Appl. Phys. Lett. 85, 4896 (2004).
- (2004) Appl. Phys. Lett , vol.85 , pp. 4896
- Yun, S.J.¹ Ko, Y.W.² Lim, J.W.³

9
- 0242583886
- B. S. Lim, A. Rahtu, and R. G. Gordon, Nat. Mater. 2, 749 (2003).
- (2003) Nat. Mater , vol.2 , pp. 749
- Lim, B.S.¹ Rahtu, A.² Gordon, R.G.³

10
- 0035922748
- C. W. Jeong, B. I. Lee, and S. K. Joo, Mater. Sci. Engin. C 16, 59 (2001).
- (2001) Mater. Sci. Engin. C , vol.16 , pp. 59
- Jeong, C.W.¹ Lee, B.I.² Joo, S.K.³

11
- 0035282191
- J. Aarik, A. Aidla, H. MaÈndar, and T. Uustare, Appl. Surf. Sci. 172, 148 (2001).
- (2001) Appl. Surf. Sci , vol.172 , pp. 148
- Aarik, J.¹ Aidla, A.² MaÈndar, H.³ Uustare, T.⁴

12
- 13444278613
- S. H. K. Park, J. Oh, C. S. Hwang, J. I. Lee, Y. S. Yang, and H. Y. Chu, Electrochem. Solid-State Lett. 8, H21 (2005).
- (2005) Electrochem. Solid-State Lett , vol.8
- Park, S.H.K.¹ Oh, J.² Hwang, C.S.³ Lee, J.I.⁴ Yang, Y.S.⁵ Chu, H.Y.⁶

13
- 0942266985
- S. J. Yun, J. W. Lim, and J. H. Lee, Electrochem. Solid-State Lett. 7, C13 (2004).
- (2004) Electrochem. Solid-State Lett , vol.7
- Yun, S.J.¹ Lim, J.W.² Lee, J.H.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.