Water permeation through organic-inorganic multilayer thin films

Thin Solid Films

Volumn 520, Issue 21, 2012, Pages 6690-6694

  Seo, Seung Woo ^a   Jung, Eun ^a   Lim, Chankyu ^a   Chae, Heeyeop ^a   Cho, Sung M ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Atomic layer deposition; Moisture barrier; Self assembled monolayer; Titanium oxide

Indexed keywords

BARRIER FILMS; DEPOSITION CHAMBERS; LAG-TIME; MOISTURE BARRIERS; MOLECULAR LAYER DEPOSITION; MULTI-LAYER THIN FILM; MULTILAYER BARRIER FILMS; MULTILAYER BARRIERS; ORGANIC-INORGANIC; PERMEATION RATE; SAM LAYER; TIO; TORTUOUS PATH; WATER ACCUMULATION; WATER PERMEATION; WATER VAPOR TRANSMISSION RATE;

ATOMIC LAYER DEPOSITION; DRIERS (MATERIALS); MULTILAYER FILMS; POLYETHYLENE TEREPHTHALATES; SELF ASSEMBLED MONOLAYERS; TITANIUM; TITANIUM DIOXIDE; TITANIUM OXIDES;

MULTILAYERS;

EID: 84864742313     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.07.017     Document Type: Article

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