Fabrication and characterization of polymer hollow microneedle array using UV lithography into micromolds

Journal of Microelectromechanical Systems

Volumn 22, Issue 5, 2013, Pages 1041-1053

  Wang, Po Chun ^a   Paik, Seung Joon ^a   Chen, Shuodan ^a   Rajaraman, Swaminathan ^c   Kim, Seong Hyok ^a,b   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b LG Electronics Inc   (South Korea)

^c AXION BIOSYSTEMS   (United States)

Author keywords

Micromolding technology; Microneedle array; SU 8 photoresist; UV lithography

Indexed keywords

FABRICATION AND CHARACTERIZATIONS; FABRICATION PROCESS; MECHANICAL CHARACTERIZATIONS; MICROMOLDING TECHNOLOGY; MICRONEEDLE ARRAYS; SU-8 PHOTORESIST; THREE-DIMENSIONAL STRUCTURE; UV LITHOGRAPHY;

DRUG DELIVERY; FABRICATION; FRACTURE; MASKS; PHOTORESISTS;

NEEDLES;

EID: 84885180560     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2262587     Document Type: Article

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