Reinforcement of PDMS masters using SU-8 truss structures

Journal of Micromechanics and Microengineering

Volumn 15, Issue 6, 2005, Pages 1303-1309

  Govindaraju, Amitha ^a   Chakraborty, Anirban ^a   Luo, Cheng ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; DEFORMATION; ELASTOMERS; PLASTICS MOLDING; REINFORCED PLASTICS; REINFORCEMENT; SHRINKAGE; STIFFNESS; TRUSSES;

POLYDIMETHYLSILOXANE (PDMS); RESIDUAL DEFORMATION; STIFFNERS; SU-8 TRUSS;

SILICONES;

EID: 18744405367     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/6/023     Document Type: Article

References (33)

1. Gadre A, Kastantin M, Li S and Ghodssi R 2001 An integrated bioMEMS fabrication technology Proc. Int. Semiconductor Device Research Symp. (Washington DC) pp 186-9
2. PDMS material safety data sheets: http://www.polyscience.com/know/msds/dow/dow_corning_200_fluid_10_cst.pdf
3. Löttersy J C, Olthuis W, Veltink P H and Bergveld P 1997 The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications J. Micromech. Microeng. 7 145-7
4. Jo B-H, Lerberghe L M V, Motsegood K M and Beebe D J 2000 Three-dimensional micro-channel fabrication in Polydimethylsiloxane (PDMS) elastomer J. Microelectromech. Syst. 9 76-81
5. Debusschere B D, Borkholder D A and Kovacs G T A 1998 Design of an integrated silicon-PDMS cell cartridge Proc. Solid-State Sensor Actuators Workshop (Hilton Head, SC, USA) pp 358-62
6. Hosogawa K, Fujii T and Endo I 1998 Hydrophobic microcapillary vent for pneumatic manipulation of liquid Process. νTAS'98 (Banff, Canada) pp 307-10
7. Xia Y N and Whitesides G M 1998 Soft lithography Annu. Rev. Mater. Sci. 28 153-84
8. Xia Y N, Rogers J A, Paul K and Whitesides G M 1999 Unconventional methods for fabricating and patterning nanostructures Chem. Rev. 99 1823-48
9. Agarwal B D and Broutman L J 1990 Analysis and Performance of Fiber Composites 2nd edn (New York: Wiley)
10. Luo C, Garra J, Schneider T, White R, Currie J and Paranjape M 2002 Determining local residual strains of polydimethylsiloxane using ink dots, and stiffening polydimethylsiloxane using SU-8 particles J. Micromech. Microeng. 12 1-5
11. Thostenson E T, Ren Z and Chou T-W 2001 Advances in the science and technology of carbon nanotubes and their composites: a review Compos. Sci. Technol. 61 1899-912
12. Uomoto T, Mutsuyoshi H, Katsuki F and Misra S 2002 Use of fiber reinforced polymer composites as reinforcing material for concrete J. Mater. Civil Eng. 14 191-209
13. Guerin L J 2004 The SU-8 homepage http://www.geocities.com/guerinlj/index.html
14. Lotters J C, Olthuis W, Veltink P H and Bergveld P 1997 The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications J. Micromech. Microeng. 7 145-7
15. Lee K Y, LaBianca N, Rishton S A, Zolgharnain S, Gelorme J D, Shaw J and Chang T H P 1995 Micromaching applications of a high resolution ultrathick photoresist J. Vac. Sci. Technol. B 13 3012-6
16. Lorenz H, Despont M and Renaud P 1998 Fabrication of photoplastic high-aspect ratio mico parts and micromolds using SU-8 UV resist Microsyst. Technol. 4 143-6
17. Dellmann L, Roth S, Beuret C, Paratte L, Racine G-A, Lorenz H, Despoint M, Renaud P, Vettiger P and de Rooij N 1998 Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components Microsyst. Technol. 4 147-50
18. Tay F, van Kan J A, Watt F and Choong W O 2001 A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels J. Micromech. Microeng. 11 27-32
19. Nijdam A J, Monica A H, Gadre A P, Long T J, Luo C, Cheng M, Schneider T W, White R C, Paranjape M and Currie J F 2005 Fluidic encapsulation in SU-8 μ-reservoirs with μ-fluidic through-chip channels Sensors Actuators A 120 172-83
20. Gadre A P et al 2004 Fabrication of a fluid encapsulated dermal patch using multilayered SU-8 Sensors Actuators A 114 478-85
21. Lorenz H, Despont M, Fahrni N, LaBianca N, Renaud P and Vettiger P 1997 SU-8: a low-cost negative resist for MEMS J. Micromech. Microeng. 7 121-4
22. Data sheets of the SU-8 provider, MicroChem Corp., Newton, MA, USA (www.microchem.com)
23. Senturia S D 2001 Microsystem Design (Dordrecht: Kluwer) pp 193-6
24. Kunnavakkam M, Houlihan F M, Schlax M, Liddle J A, Kolodner P, Nalamasu O and Rogers J A 2003 Low-cost, low-loses microlens arrays fabricated by soft-lithography replication process Appl. Phys. Lett. 82 1152-4
25. Hull R 1999 Properties of Crystalline Silicon (London: INSPEC)
26. Spiering V L, Bouwstra S and Spiering R 1993 On chip decoupling zone for package-stress reduction Sensors Actuators A 39 149-56
27. Luo C, Govindaraju A, Garra J, Schneider T, White R, Currie J and Paranjape M 2004 Releasing SU-8 structures using polystyrene as a sacrificial material Sensors Actuators A 114 123-8
28. Cheng M C, Garra J A, Gadre A P, Nijdam A J, Luo C, Paranjape M, Currie J F, Schneider T and White R 2004 Dry release of polymer structures with anti-sticking layer J. Vac. Sci. Technol. A 22 837-41
29. Flack W W, Kulas S and Minsek D W 2000 Process characterization of an ultra-thick strippable photoresist using a broadband stepper Proc. SPIE 3999 452-63
30. Kim K S, Park S W, Manohara H and Lee J B 2000 Polydimethylsiloxane (PDMS) for high aspect ratio three-dimensional MEMS Int. Symp. Mechatronics and Intelligent Mechanical System for 21 Century (ISIM2000) (KyongSangNam-Do, Korea)
31. Sze S M 1988 VLSI Technology 2nd edn (New York: McGraw-Hill)
32. Bosch Gmbh R 1994 US Patent Specification 4855017
33. Bosch Gmbh R 1994 US Patent Specification 4784720