Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication

Journal of Micromechanics and Microengineering

Volumn 21, Issue 3, 2011, Pages

  Kim, Jungkwun ^a,b   Allen, Mark G ^c   Yoon, Yong Kyu ^a,b  

^a UNIVERSITY OF FLORIDA   (United States)

^b UNIVERSITY AT BUFFALO   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D MICRO-FABRICATION; 3D STRUCTURE; ARBITRARY SHAPE; CONTROLLED DYNAMICS; FABRICATION PROCESS; MATHEMATICAL TOOLS; MODE DYNAMICS; MODE OPERATION; MULTI-DIRECTIONAL; MULTIDIRECTIONAL UV LITHOGRAPHY; NON-SYMMETRIC PATTERNS; PIECE-WISE; PROCESS PARAMETERS; PROGRAMMING SOFTWARE; RAY TRACE SIMULATION; ROTATING MOTION; ROTATIONAL ANGLE; SCREWED WIND VANE; SPHERICAL COORDINATE SYSTEMS; STEPPER MOTOR; SYMMETRIC PATTERNS; THREE-DIMENSIONAL (3D) MICROSTRUCTURES; TILTING MOTION; TWO-MOTOR; ULTRAVIOLET LITHOGRAPHY; UV EXPOSURE; UV LITHOGRAPHY;

ANGULAR VELOCITY; COMPUTER PROGRAMMING; LAPTOP COMPUTERS; LIGHT SOURCES; LITHOGRAPHY; MICROFABRICATION; ROTATION; SYNCHRONOUS MOTORS;

THREE DIMENSIONAL;

EID: 79952643489     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/3/035003     Document Type: Article

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