Diffusing and swelling in SU-8: Insight in material properties and processing

Journal of Micromechanics and Microengineering

Volumn 20, Issue 9, 2010, Pages

  Wouters, Kristof ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; CONSTRUCTION MATERIALS; CRACK FORMATION; DIFFUSION CONSTANT; DIFFUSION MECHANISMS; INTERNAL STRESS; ISOPROPYL ALCOHOLS; MATERIAL PROPERTY; MECHANICAL BEHAVIOR; MECHANICAL COMPONENTS; MECHANICAL DISPLACEMENTS; MECHANICAL RESPONSE; PROPYLENE GLYCOL METHYL ETHER; QUANTITATIVE INVESTIGATION; SU-8 STRUCTURE; SWELLING BEHAVIOR; VOLUME CHANGE;

BUILDING MATERIALS; ETHERS; GLYCOLS; MATHEMATICAL MODELS;

PROPYLENE;

EID: 77957851496     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/9/095013     Document Type: Article

References (27)

1. Suzuki Y and Tai Y C 2003 Micromachined high-aspect-ratio parylene beam and its application to low-frequency seismometers Proc. Int. Conf. MEMS'03 pp 486-9
2. Someya T et al 2004 A large-area, flexible pressure sensor matrix with organic filed-effect transistors for artificial skin applications Proc. Natl Acad. Sci. 101 9966-70
3. Kato Y et al 2007 Sheet-type Braille displays by integrating organic field-effect transistors and polymeric actuators IEEE Trans. Electron Devices 54 202-9
4. Engel J M et al 2006 Polyurethane rubber all-polymer artificial hair cell sensor J. Microelectromech. Syst. 15 729-36
5. Lorenz H et al 1997 SU-8: a low-cost negative resist for MEMS J. Micromech. Microeng. 7 121-4
6. Zhou Z et al 2007 The swelling effect during the development processes of deep UV lithography of SU-8 photoresists: theoretical study, simulation and verification IEEE sensor 2007 Conf. pp 325-8
7. Abgrall P and Gue A-M 2007 Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem-a review J. Micromech. Microeng. 17 R15-49
8. Schmid S et al 2009 Influence of air humidity on polymeric microresonators J. Micromech. Microeng. 19 065018
9. Feng R and Farris R J 2003 Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coating J. Micromech. Microeng. 13 80-8
10. Johansson A et al 2005 SU-8 cantilever sensor system with integrated readout Proc. 18th European Conf. on Solid-State Transducers (Eurosensors XVIII 2004); Sensors Actuators A 123-124 111-5
11. Hill G C et al 2007 SU-8 MEMS Fabry-Perot pressure sensor Sensors Actuators A 138 52-62
12. Yi L et al 2005 Swelling of SU-8 structure in Ni mold fabrication by UV-LIGA technique Microsyst. Technol. 11 1272-5
13. Bachmann D et al 2006 Fabrication and characterization of folded SU-8 suspensions for MEMS applications Sensors Actuators A 130-131 379-86
14. Keller S et al 2008 Processing of thin SU-8 films J. Micromech. Microeng. 18 125020
15. Sameoto D et al 2007 Control of the out-of-plane curvature in SU-8 compliant microstructures by exposure dose and baking times J. Micromech. Microeng. 17 1093-8
16. Anhoj T A et al 2006 The effect of soft bake temperature on the polymerization of SU-8 photoresist J. Micromech. Microeng. 16 1819-24
17. Wouters K and Puers R 2007 Design and measurement of stress indicator structures for the characterization of Epoclad negative photoresist J. Micromech. Microeng. 19 074019
18. Goosen J F L et al 1993 Stress measurement structures for micromachined sensors Tech. Dig. 7th Int. Conf. on Solid State Sensors and Actuators, Transducers'93 pp 783-6
19. Biot M A 1941 General theory of three-dimensional consolidation J. Appl. Phys. 12 155-64
20. Cui L and Abousleiman Y 2001 Time-dependent poromechanical responses of saturated cylinders J. Eng. Mech. 127 391-8
21. Hoang S K and Abousleiman Y N 2009 Poroviscoelastic two-dimensional anisotropic solution with application to articular cartilage testing J. Eng. Mech. 135 367-74
22. Chiarelli P 2004 The poro-elastic behavior of a gel thin tube Mater. Sci. Eng. C 24 463-71
23. Murad M A et al 2001 Micromechanical computational modeling of secondary consolidation and hereditary creep in soils Comput. Methods Appl. Mech. Eng. 190 1985-2016
24. Coussy O 2004 Poromechanics (New York: Wiley)
25. Schiff J L 1999 The Laplace Transform: Theory and Applications (Berlin: Springer)
26. Wouters K and Puers R 2009 Determining the Young's modulus and creep effects in three different photo definable epoxies for MEMS applications Sensors Actuators A 15 196-200
27. Dermitzaki E et al 2008 Structure property correlation of epoxy resins under the influence of moisture; and comparison of diffusion coefficient with MD-simulation Proc. 2nd Electronics System Integration Technology Conf. (Greenwich, UK, 2008) pp 897-902