Fabrication of a high-aspect-ratio sub-micron tool using a cathode coated with stretched-out insulating layers

Review of Scientific Instruments

Volumn 84, Issue 9, 2013, Pages

  Zeng, Yongbin ^a   Wang, Yufeng ^a   Qu, Ningsong ^a   Zhu, Di ^a  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE DIAMETER; ELECTROCHEMICAL MACHINING; HIGH ASPECT RATIO; INSULATING LAYERS; RECIPROCATING MOTION; SUBMICRON;

CATHODES; ELECTROCHEMICAL CUTTING; FABRICATION; INSULATING MATERIALS; MATHEMATICAL MODELS; TOOLS;

ASPECT RATIO;

EID: 84885116547     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4822113     Document Type: Article

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