|
Volumn 34, Issue 3, 2010, Pages 489-496
|
Fabrication of tungsten microelectrodes using pulsed electrochemical machining
|
Author keywords
Electrochemical micromachining; Microelectrode; Pulsed voltage; Tungsten rod; Viscous layer
|
Indexed keywords
APPLIED VOLTAGES;
ELECTROCHEMICAL MICROMACHINING;
MACHINING METHODS;
MICROELECTROMECHANICAL SYSTEMS;
PULSED ELECTROCHEMICAL MACHINING;
PULSED PERIOD;
PULSED VOLTAGES;
TUNGSTEN ROD;
VISCOUS LAYERS;
WORKING PARAMETERS;
COMPOSITE MICROMECHANICS;
ELECTRIC DISCHARGE MACHINING;
ELECTROCHEMICAL CUTTING;
FABRICATION;
MICROMACHINING;
SURFACE DEFECTS;
TUNGSTEN;
MICROELECTRODES;
|
EID: 77951295564
PISSN: 01416359
EISSN: None
Source Type: Journal
DOI: 10.1016/j.precisioneng.2010.01.001 Document Type: Article |
Times cited : (52)
|
References (9)
|