Development of microelectrodes for electrochemical micromachining

International Journal of Advanced Manufacturing Technology

Volumn 55, Issue 1-4, 2011, Pages 195-203

  Liu, Yong ^a   Zhu, Di ^a   Zeng, Yongbin ^a   Yu, Hongbing ^a  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

3D microstructure; Electrochemical etching; Electrochemical micromachining; End shape; Micro holes; Single electric discharge

Indexed keywords

3D MICROSTRUCTURES; ELECTROCHEMICAL MICRO-MACHINING; END SHAPE; MICRO HOLES; SINGLE ELECTRIC DISCHARGE;

COMPOSITE MICROMECHANICS; ELECTROCHEMICAL ETCHING; METALLOGRAPHIC MICROSTRUCTURE; MICROELECTRODES; MICROMACHINING; THREE DIMENSIONAL;

ELECTRIC DISCHARGES;

EID: 79958849222     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-010-3035-2     Document Type: Article

References (16)

1. JA McGeough MC Leu KP Rajurkar AKM De Silva Q Liu 2001 Electroforming process and application to micro/macro manufacturing Ann CIRP 50 2 499 514 10.1016/S0007-8506(07)62990-4 (Pubitemid 34012688)
2. KP Rajurkar G Levy AP Malshe MM Sundaram JA McGeough X Hu R Resnick A DeSilva 2006 Micro and nano machining by electro-physical and chemical processes Ann CIRP 55 2 643 666 10.1016/j.cirp.2006.10.002 (Pubitemid 46148811)
3. R Schuster V Kirchner P Allongue G Ertl 2000 Electrochemical micromachining Science 289 98 101 10.1126/science.289.5476.98 (Pubitemid 30463298)
4. AL Trimmer JL Hudson M Kock R Schuster 2003 Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses Appl Phys Lett 82 3327 3329 10.1063/1.1576499
5. B Bhattacharyya J Munda M Malapati 2004 Advancement in electrochemical micro-machining Int J Mach Tools Manuf 44 15 1577 1589 10.1016/j.ijmachtools. 2004.06.006
6. ES Lee SY Baek CR Cho 2005 A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses Int J Adv Manuf Technol 31 762 769 10.1007/s00170-005-0247-y
7. BH Kim SH Ryu DK Choi CN Chu 2005 Micro electrochemical milling J Micromech Microeng 15 1 124 129 10.1088/0960-1317/15/1/019 (Pubitemid 40121486)
8. BH Kim CW Na YS Lee DK Choi CN Chu 2005 Micro electrochemical machining of 3D micro structure using dilute sulfuric acid Ann CIRP 54 1 191 194 10.1016/S0007-8506(07)60081-X (Pubitemid 40948439)
9. T Kurita K Chikamori S Kubota M Hattori 2006 A study of three-dimensional shape machining with an ECμM system Int J Mach Tools Manuf 46 1311 1318 10.1016/j.ijmachtools.2005.10.013 (Pubitemid 44137465)
10. I Ekvall E Wahlström D Claesson 1999 Preparation and characterization of electrochemically etched W tips for STM Meas Sci Technol 10 1 11 18 10.1088/0957-0233/10/1/006
11. Y Yamagata T Higuchi 1995 Three-dimensional micro fabrication by precision cutting technique J Jpn Soc Precision Eng 61 10 1361 1364
12. T Waida K Okano 1995 Micro-grinding of micro-machine component J Jpn Soc Precision Eng 61 10 1365 1368
13. T Masuzawa M Fujino K Kobayashi T Suzuki N Kinoshita 1985 Wire electro-discharge grinding for micro-machining Ann CIRP 34 1 431 434 10.1016/S0007-8506(07)61805-8
14. YM Lim SH Kim 2001 An electrochemical fabrication method for extremely thin cylindrical micropin Int J Mach Tools Manuf 41 15 2287 2296 10.1016/S0890-6955(00)00129-2 (Pubitemid 32785162)
15. MH Wang D Zhu ZY Zhang 2006 Fabrication of micro-pin based on electrochemical etching Chin J Mech Eng 42 6 128 132 10.3901/JME.2006.06.128 (Pubitemid 44248852)
16. SQ Qian D Zhu NS Qu HS Li DS Yan 2010 Generating micro-dimples arrays on the hard chrome-coated surface by modified through mask electrochemical micromachining Int J Adv Manuf Technol 47 1121 1127 10.1007/s00170-009-2246-x