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Volumn 545, Issue , 2013, Pages 601-607

Superconducting niobium nitride thin films by reactive pulsed laser deposition

Author keywords

NbN; Pulsed laser deposition; Thin films; X ray spectroscopy

Indexed keywords

CONTINUOUS STIFFNESS METHODS; HARDNESS AND MODULUS; NANOMECHANICAL PROPERTY; NBN; NITROGEN GAS PRESSURE; REACTIVE PULSED LASER DEPOSITION; SUBSTRATE TEMPERATURE; SUPERCONDUCTING PROPERTIES;

EID: 84884990381     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.08.051     Document Type: Article
Times cited : (26)

References (46)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.