SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 202, Issue 24, 2008, Pages 5919-5923

The effect of nitrogen pressure on cathodic arc deposited NbN thin films

(3) Cansever, N a Danisman M a Kazmanli, K b

a YILDIZ TECHNICAL UNIVERSITY (Turkey)

b ISTANBUL TECHNICAL UNIVERSITY (Turkey)

Author keywords

Cathodic arc deposition; Deconvolation; Nanoindentation; NbN thin films; XRD

Indexed keywords

CAVITY RESONATORS; CHROMIUM; MOLYBDENUM; NITROGEN; NONMETALS; STANDARDS; THICK FILMS;

CATHODIC ARC DEPOSITION; CATHODIC ARCS; DECONVOLATION; HIGH-SPEED STEEL; NANOINDENTATION; NBN THIN FILMS; NITROGEN PRESSURES; XRD;

THIN FILMS;

EID: 50449096439 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2008.06.158 Document Type: Article

Times cited : (54)

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