Investigation of the crystal structure on the nanomechanical properties of pulsed laser deposited niobium nitride thin films

Journal of Materials Research

Volumn 27, Issue 13, 2012, Pages 1725-1731

  Mamun, Md Abdullah Al ^a,b   Farha, Ashraf Hassan ^a,b   Ufuktepe, Ÿksel ^c   Elsayed Ali, Hani E ^a,b   Elmustafa, Abdelmageed A ^a,b  

^a Old Dominion University   (United States)

^b THOMAS JEFFERSON NATIONAL ACCELERATOR FACILITY   (United States)

^c CUKUROVA UNIVERSITY   (Turkey)

Author keywords

hardness; nano indentation; X ray diffraction (XRD)

Indexed keywords

HEXAGONAL PHASIS; NANOMECHANICAL PROPERTY; NBN THIN FILM; NIOBIUM NITRIDE; PHASE CHARACTERIZATION; XRD ANALYSIS;

ATOMIC FORCE MICROSCOPY; HARDNESS; NANOINDENTATION; NIOBIUM; NITRIDES; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION;

PULSED LASER DEPOSITION;

EID: 84862509000     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/jmr.2012.167     Document Type: Article

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