Nanoindentation on single-crystal Si modified by 100 keV Cr+ implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1629-1634

  Mishra, P ^a   Bhattacharyya, S R ^a   Ghose, D ^a  

^a SAHA INSTITUTE OF NUCLEAR PHYSICS   (India)

Author keywords

Cr+ Implantation; Nanoindentation; Nanoscratch; Silicon

Indexed keywords

CORROSION RESISTANCE; ELASTIC MODULI; ION IMPLANTATION; NANOINDENTATION; SINGLE CRYSTALS; SURFACE PROPERTIES;

DEPTH-SENSING NANOINDENTATION; NANOSCRATCH; NEAR-SURFACE HARDNESS; SURFACE MECHANICAL PROPERTIES;

SILICON COMPOUNDS;

EID: 43149096686     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.12.036     Document Type: Article

References (12)

1. Nastasi M., Mayer J.W., and Hirvonen J.K. Ion-Solid Interactions: Fundamentals and Applications (1996), Cambridge University Press
2. Misiuk A., Barcz A., Chow L., Surma B., Bak-Misiuk J., and Prujszczyk M. Solid State Phenom. 131 (2008) 375
3. Misiuk A., Chow L., Barcz A., Surma B., Bak-Misiuk J., Romanowski P., Osinniy W., Salman F., Chai G., Prujszczyk M., and Trojan A. In: Claeys C.L., Falster R., Watanabe M., and Stallhofer P. (Eds). High Purity Silicon 9 Vol. 3, No. 4 (2006), The Electrochemical Society, ECS Transactions 481
4. Oliver W.C., and Pharr G.M. J. Mater. Res. 7 (1992) 1564
5. Fang T.H., Chang W.J., and Lin C.M. Microelectron. Eng. 77 (2005) 389
6. Beegan D., Chowdhury S., and Laugier M.T. Surf. Coat. Technol. 201 (2007) 5804
7. Zhang P., Stevie F., Vanfleet R., Neelakanan R., Klimov M., Zhou D., and Chow L. J. Appl. Phys. 96 (2004) 1053
8. J.F. Ziegler, IBM Research, SRIM-2000.40 (PC version), Yorktown Heights, NY, 1999.
9. Sun R., Xu T., and Xue Q.J. Surf. Coat. Technol. 200 (2006) 5794
10. Wang Q., Ishikawa H., Ogiso H., Nakano S., and Akedo J. Nucl. Instr. and Meth. B 217 (2004) 598
11. Nix W.D., and Gao H. J. Mech. Phys. Solids 46 (1998) 411
12. Mishra P., and Ghose D. Surf. Coat. Technol. 201 (2006) 965