Nanomechanical properties of NbN films prepared by pulsed laser deposition using nanoindendation

Applied Surface Science

Volumn 258, Issue 10, 2012, Pages 4308-4313

  Mamun, M A ^a,c   Farha, A H ^a,c   Er, A O ^a   Ufuktepe, Y ^b   Gu, D ^a,c   Elsayed Ali, H E ^a,c   Elmustafa, A A ^a,c  

^a Old Dominion University   (United States)

^b CUKUROVA UNIVERSITY   (Turkey)

^c THOMAS JEFFERSON NATIONAL ACCELERATOR FACILITY   (United States)

Author keywords

AFM; Hardness; Modulus; Nanoindentation; Nanomechanical properties; NbN; PLD; TEM; XRD

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ATOMIC STRUCTURE; HARDNESS; NANOINDENTATION; NITRIDES; PILES; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER DEPOSITION; PULSED LASERS; SILICON; SUPERCONDUCTING FILMS; SURFACE ROUGHNESS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

AVERAGE SURFACE ROUGHNESS; CONTINUOUS STIFFNESS METHODS; HARDNESS AND MODULUS; MODULUS; NANOMECHANICAL PROPERTY; POLYCRYSTALLINE STRUCTURE; PREFERRED ORIENTATIONS; STRUCTURAL AND MECHANICAL PROPERTIES;

NIOBIUM COMPOUNDS;

EID: 84857918288     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.12.089     Document Type: Article

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