Superconducting niobium nitride films deposited by unbalanced magnetron sputtering

Thin Solid Films

Volumn 516, Issue 23, 2008, Pages 8768-8773

  Olaya, J J ^a   Huerta, L ^b   Rodil, S E ^b   Escamilla, R ^b  

^a UNIVERSIDAD NACIONAL DE COLOMBIA   (Colombia)

^b UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Electron spectroscopy; Magnetron sputtering; Niobium nitride; Nitride; Superconducting films

Indexed keywords

COMPUTER NETWORKS; ELECTRIC PROPERTIES; FILM GROWTH; MAGNETIC FIELD MEASUREMENT; MAGNETIC FIELDS; MAGNETIC THIN FILMS; MAGNETRONS; NIOBIUM; NITRIDES; SUPERCONDUCTING FILMS; THICK FILMS; TRANSITION METALS;

ELECTRON SPECTROSCOPY; FILM PROPERTIES; NIOBIUM NITRIDE; NITRIDE;

MAGNETRON SPUTTERING;

EID: 51049120252     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.06.065     Document Type: Article

References (56)

1. Rando A., Peacock C., Foden A.V., Dordrecht J., Lumley C., and Pereira C. J. Appl. Phys. 73 (1993) 5096
2. Goltsman G.N., Semenov A.D., Gousev Y.P., Zorin M.A., Gogidze I.G., Gershenzon E.M., Lang P.T., Knott W.J., and Renk K.F. Supercond. Sci. Technol. 4 (1991) 453
3. Dietrich M. IEEE Trans. Magn. 21 (1985) 455
4. Shaternik V.E., Larkin S.Y., and Khachaturova T.A. Physica C 435 (2006) 96
5. Larsson N., Hollman P., Hendequist P., Hogmark S., Wahlstrom U., and Hultman L. Surf. Coat. Technol. 86-87 (1996) 351
6. Andrievski R.A., Anisimova T.A., and Anisimov V.P. Thin Solid Films 205 (1991) 171
7. Toth L.E. Transition Metal Carbides and Nitrides, (1971), Academic Press, New York NY
8. Hotovy A., Buc D., Brcka J., and Srnanek R. Phys. Stat. Solidi 161 (1997) 97
9. Havey K.S., Zabinsky J.S., and Walck S.D. Thin Solid Films 303 (1997) 238
10. Buttig K., Liemersdorf H., Kinder H., and Reichelt K. J. Appl. Phys. 44 (1973) 5069
11. Hao J., Jiao F., Xie D., and Zhao K. Physica C 450 (2006) 101
12. Semenov I., Haas P., Ill K., in, Hubers H.W., Siegel M., Engel A., and Smirnov A. Physica C 460-462 (2007) 1491
13. Gao J.R., Hajenius M., Tichelaar F.D., Klapwijk T.M., Voronov B., Grishin E., and Goltsman G. Appl. Phys. Lett. 91 (2007) 062504
14. Bourgeois O., André E., Macovei C., and Chaussy J. Rev. Sci. Instrum. 77 (2006) 126108
15. Alén P., Ritala M., Arstila K., Keinone J., and Lesuela M. Thin Solid Films 491 (2005) 235
16. Lucci M., Sanna S., Contini G., Zema N., Merlo V., Salvato M., Thanh H.N., and Davoli I. Surf. Sci. 601 (2007) 2647
17. Kelly P.J., and Arnell R.D. Vacuum 56 (2000) 159
18. Kelly P.J., and Arnell R.D. Surf. Coat. Technol. 97 (1997) 595
19. Rodil S.E., and Olaya J.J. J. Phys. Condens. Mat. 18 (2006) 703
20. Svadkovski I.V., Golosov D.A., and Zavatskiy S.M. Vacuum 68 (2003) 283
21. Rodil S.E., Olaya J.J., Muhl S., Bhushan B., and Wei G. Surf. Coat. Technol. 201 (2007) 6117
22. J.J. Olaya, S.E. Rodil, S. Muhl, Thin Solid Films, In Press.
23. Toth L.E. Transition Metal Carbides and Nitrides (1971), Academic Press, New York
24. Sanjinés R., Benkahoul M., Sandu C.S., Schmid P.E., and Lévy F. Thin Solid Films 494 (2006) 190
25. Cukauskas E.J., Qadri S.B., and Carter W.L. J. Appl. Phys. 65 (1989) 2053
26. Deen M.J., Landheer D., Wade J.D., Sproule G.I., and Denhof M.D. J. Vac. Sci. Technol. A 6 (1988) 2299
27. Thakoor S., Lamb J.L., Thakoor A.P., and Khanna S.K. J. Appl. Phys. 58 (1985) 4643
28. Sahara T., Hirao K., Miyamoto Y., and Koizumi M. J. Soc. Mater. Sci. Jpn. 37 (1988) 55
29. Lide D.R. CRC Handbook of Chemistry and Physics. 82nd ed. (2001-2002), CRC Press LLC 12
30. International Centre for Diffraction Data, Join Committee on Powder Diffraction Standards (JCPDS) database. Cards No. 171-0162 and 35-0789.
31. Cunha L., and Andritschky M. Surf. Coat. Technol. 111 (1999) 158
32. Fenker M., Balzer M., Buchi R.V., Jehn H.A., Kappl H., and Lee J.J. Surf. Coat. Technol. 163-164 (2003) 169
33. Lucci M., Thanh H., and Davoli I. Superlattices Microstruct. 43 (2008) 518
34. Sanjines R., Benkahoul M., Papagno M., and Lévy F. J. Appl. Phys. 99 (2006) 044911
35. Aeppli G., Stolz H.J., and Pollack R.A. Phys. Rev. B 24 (1981) 4128
36. Petrov I., Barna P.B., Hultman L., and Greene J.E. J. Vac. Sci. Technol. A 21 (2003) S117
37. Gall D., Kodambaka S., Wall M.A., Petrov I., and Greene J.E. J. Appl. Phys. 93 (2003) 9086
38. Pelleg J., Zevin L.Z., and Lungo S. Thin Solid Films 197 (1991) 117
39. Zhao J.P., Wang X., Chen Z.Y., Yang S.Q., Shi T.S., and Liu X.H. J. Phys. D: Appl. Phys. 30 (1997) 5
40. Reiss G., Vancea J., and Hoffmann H. Phys. Rev. Lett. 56 (1986) 2100
41. Nigro A., Nobile G., Rubino M.G., and Vaglio R. Phys. Rev. B 37 (1988) 3970
42. Tyan J.H., and Lue J.T. J. Appl. Phys. 75 (1994) 325
43. Abeles B. Phys. Rev. B 15 (1977) 2828
44. Kim H., Gray K.E., Kampwirth R.T., Woo K.C., Kay D.M., and Stein J. Phys. Rev. B 41 (1990) 11642
45. Clem J.R., Bumble B., Raider S.I., Gallagher W.J., and Shih Y.C. Phys. Rev. B 35 (1987) 6637
46. Senapati K., Pandey N.K., Nagar R., and Budhani R.C. Phys. Rev. B 74 (2006) 104514
47. Lamura G., Villegier J.C., Gauzzi A., Le Cochec J., Laval J.Y., Placais B., Hadacek N., and Bok J. Phys. Rev. B 65 (2002) 104507
48. Bose S., Banerjee R., Genc A., Raychaudhuri P., Frase H.L., and Ayyub P. J. Phys. Condens. Mat. 18 (2006) 4553
49. Chen X.J., Struzhkin V.V., Wu Z., Cohen R.E., Kung S., Mao H.K., Hemley R.J., and Christensen A.N. Phys. Rev. B 72 (2005) 094514
50. Phillips C. J. Appl. Phys. 43 (1972) 3560
51. Holleck H. J. Vac. Sci. Technol. A 4 (1986) 2661
52. Williams W.S. Mater. Sci. Eng. A 105/106 (1988) 1
53. Jiang X., Wang M., Schmidt K., Dunlop E., Haupt J., and Gissler W. J. Appl. Phys. 69 (1991) 3053
54. Panjan P., Navinšek B., Žabkar A., Marinković V., Mandrino D., and Fišer J. Thin Solid Films 228 (1993) 233
55. Storms K., Giorgi A.L., and Szklarz E.G. J. Phys. Chem. Solids 36 (1975) 689
56. Veprek S., Veprek-Heijman M.G.J., Karvankova P., and Prochazka J. Thin Solid Films 476 (2005) 1