Hot pulling and embossing of hierarchical nano- and micro-structures

Journal of Micromechanics and Microengineering

Volumn 23, Issue 10, 2013, Pages

  Röhrig, Michael ^a   Schneider, Marc ^a   Etienne, Guénola ^a   Oulhadj, Farid ^a   Pfannes, Fabian ^a   Kolew, Alexander ^a   Worgull, Matthias ^a   Hölscher, Hendrik ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BIO-INSPIRED DESIGNS; DEMOLDING FORCES; ELECTRO-MECHANICAL SENSORS; HIERARCHICAL STRUCTURES; HIGH ASPECT RATIO; HIGH SCALABILITIES; HOT-EMBOSSING; REPLICATION TECHNIQUES;

ASPECT RATIO;

NANOSTRUCTURES;

EID: 84884822564     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/10/105014     Document Type: Article

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