Compact 3D microfluidic channel structures embedded in glass fabricated by femtosecond laser direct writing

Journal of Laser Micro Nanoengineering

Volumn 8, Issue 2, 2013, Pages 170-174

  Liu, Changning ^a   Liao, Yang ^a   He, Fei ^a   Song, Jiangxin ^a   Lin, Di ^a   Cheng, Ya ^a   Sugioka, Koji ^b   Midorikawa, Katsumi ^b  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b RIKEN   (Japan)

Author keywords

Femtosecond laser micromachining; Microfluidic channel; Three dimensional

Indexed keywords

FEMTOSECOND LASER MICROMACHINING; FOCUSED FEMTOSECOND LASERS; GLASS SUBSTRATES; LASER DIRECT WRITING; LASER MICRO PROCESSING; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CHANNEL; RAPID FABRICATION;

FABRICATION; FLUIDIC DEVICES; SUBSTRATES; THREE DIMENSIONAL; ULTRASHORT PULSES;

GLASS;

EID: 84884698206     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2013.02.0010     Document Type: Article

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