The SMART™ process for directed block co-polymer self-assembly

Journal of Photopolymer Science and Technology

Volumn 26, Issue 5, 2013, Pages 573-579

  Kim, Jihoon ^a   Wan, Jingxiu ^a   Miyazaki, Shinji ^c   Yin, Jian ^a   Cao, Yi ^a   Her, YoungJun ^b   Wu, Hengpeng ^a   Shan, Jianhui ^a   Kurosawa, Kazunori ^c   Lin, Guanyang ^a  

^a AZ Electronic Materials USA Corp   (United States)

^b AZ Electronic Materials (Korea) Ltd   (South Korea)

^c AZ Electronic Materials (Japan) KK   (Japan)

Author keywords

AZ SMART; BCP; Block co polymer; Directed self assembly; DSA; Poly(styrene b methylmethacrylate); PS b PMMA

Indexed keywords

EID: 84883724367     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.26.573     Document Type: Article

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