Volatile and thermally stable mid to late transition metal complexes containing α-imino alkoxide ligands, a new strongly reducing coreagent, and thermal atomic layer deposition of Ni, Co, Fe, and Cr metal films

Journal of the American Chemical Society

Volumn 135, Issue 34, 2013, Pages 12588-12591

  Kalutarage, Lakmal C ^a   Martin, Philip D ^a   Heeg, Mary Jane ^a   Winter, Charles H ^a  

^a WAYNE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALD GROWTH; ALKOXIDE LIGANDS; ALKOXIDES; CR METAL FILMS; HIGH THERMAL STABILITY; LATE TRANSITION METAL COMPLEXES; SOLUTION REACTION; THERMALLY STABLE;

COBALT; DEPOSITION; FILM GROWTH; MANGANESE; NICKEL; POWDER METALS; THERMODYNAMIC STABILITY;

ATOMIC LAYER DEPOSITION;

ALPHA IMINO ALKOXIDE LIGAND; CHROMIUM; COBALT; COPPER; IRON; MANGANESE; METAL COMPLEX; NICKEL; ORGANIC COMPOUND; REAGENT; UNCLASSIFIED DRUG;

ARTICLE; ATOMIC LAYER DEPOSITION; CHEMICAL REACTION; COMPLEX FORMATION; CRYSTAL STRUCTURE; FILM; NANOTECHNOLOGY; OXIDATION; STRUCTURE ANALYSIS; SYNTHESIS; THERMOSTABILITY;

EID: 84883276128     PISSN: 00027863     EISSN: 15205126     Source Type: Journal    
DOI: 10.1021/ja407014w     Document Type: Article

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