SCOPUS 정보 검색 플랫폼

Volumn 16, Issue 4, 2009, Pages 219-225

Area selective atomic layer deposition of cobalt thin films

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ATOMS; COBALT; THIN FILMS;

AREA SELECTIVE; BLOCKING LAYERS; CO THIN FILMS; COBALT THIN FILMS; NH3 PLASMAS; OCTADECYLTRICHLOROSILANE; RAPID DEGRADATION; SELECTIVE DEPOSITION;

ATOMIC LAYER DEPOSITION;

EID: 63149085032 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.2979997 Document Type: Conference Paper

Times cited : (39)

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