A lithographically patterned discrete planar electrode linear ion trap mass spectrometer

Journal of Microelectromechanical Systems

Volumn 22, Issue 4, 2013, Pages 876-883

  Hansen, Brett J ^a   Niemi, Richard J ^a   Hawkins, Aaron R ^a   Lammert, Stephen A ^b   Austin, Daniel E ^a  

^a BRIGHAM YOUNG UNIVERSITY   (United States)

^b Torion Technologies Inc   (United States)

Author keywords

Linear ion trap (LIT); mass spectrometry; microfabrication

Indexed keywords

CERAMIC SUBSTRATES; ELECTRODE PATTERN; ION TRAP MASS SPECTROMETER; LINEAR ION TRAP; METAL ELECTRODES; PLANAR ELECTRODE; RADIO FREQUENCIES; SPECIFIC VOLTAGES;

ELECTRIC FIELDS; MASS SPECTROMETRY; MICROFABRICATION; SURFACE ROUGHNESS;

MASS SPECTROMETERS;

EID: 84881474488     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2248128     Document Type: Article

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