Silicon based quadrupole mass spectrometry using microelectromechanical systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 2, 2001, Pages 557-562

  Taylor, S ^a   Tindall, R F ^b   Syms, R R A ^c  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b TinT Design Ltd   (United Kingdom)

^c IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; FABRICATION; MASS SPECTROMETRY; SILICON;

MICROELECTROMECHANICAL SYSTEMS TECHNOLOGY; QUADRUPOLE MASS SPECTROMETRY;

MICROELECTROMECHANICAL DEVICES;

EID: 0035272057     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1359172     Document Type: Article

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