Highly organised and dense vertical silicon nanowire arrays grown in porous alumina template on <100> silicon wafers

Nanoscale Research Letters

Volumn 8, Issue 1, 2013, Pages 1-9

  Gorisse, Therese ^a,b   Dupré, Ludovic ^b   Gentile, Pascal ^b   Martin, Mickael ^a   Zelsmann, Marc ^a   Buttard, Denis ^b  

^a Laboratoire Interdisciplinaire de Physique   (France)

^b UNIV GRENOBLE ALPES   (France)

Author keywords

Anodic alumina oxide; Chemical vapour deposition; Defect free; Hexagonal array; Nanoimprint lithography; Nanowires; Silicon; Templates

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ANODIC OXIDATION; CHEMICAL VAPOR DEPOSITION; ETCHING; MICROELECTRONIC PROCESSING; MICROELECTRONICS; MONOCRYSTALLINE SILICON; NANOIMPRINT LITHOGRAPHY; NANOWIRES; POROUS SILICON; SILICON; SILICON DETECTORS;

ANODIC ALUMINA OXIDE; CHEMICAL VAPOUR DEPOSITION; DEFECT-FREE; HEXAGONAL ARRAYS; TEMPLATES;

SILICON WAFERS;

EID: 84881253588     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-8-287     Document Type: Article

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