Controlled, perfect ordering in ultrathin anodic aluminum oxide templates on silicon

Applied Physics Letters

Volumn 91, Issue 14, 2007, Pages

  Robinson, Adam P ^a   Burnell, Gavin ^a   Hu, Mingzhe ^a   Macmanus Driscoll, Judith L ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC ALUMINUM OXIDE; ION BEAM PREPATTERNING; SQUARE GEOMETRIES;

ALUMINUM COMPOUNDS; ION BEAMS; SILICON;

ULTRATHIN FILMS;

EID: 34948888342     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2794031     Document Type: Article

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