Fabrication of low loss MOMS resonators for quantum optics experiments

Journal of Micromechanics and Microengineering

Volumn 23, Issue 8, 2013, Pages

  Serra, E ^a,b,c   Bagolini, A ^d   Borrielli, A ^b,d   Boscardin, M ^d   Cataliotti, F S ^e,f,g   Marin, F ^e,f,g   Marino, F ^e,f,h   Pontin, A ^a,b   Prodi, G A ^a,b   Vannoni, M ⁱ   Bonaldi, M ^b,d  

^a UNIVERSITY OF TRENTO   (Italy)

^b INFN TIFPA   (Italy)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d FONDAZIONE BRUNO KESSLER   (Italy)

^e UNIVERSITY OF FLORENCE   (Italy)

^f INFN SEZIONE DI FIRENZE   (Italy)

^g UNIVERSITY OF FLORENCE   (Italy)

^h ISTITUTO DEI SISTEMI COMPLESSI   (Italy)

ⁱ ISTITUTO NAZIONALE DI OTTICA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENIC TEMPERATURES; DIELECTRIC MIRRORS; FABRICATION AND CHARACTERIZATIONS; FABRY-PEROT CAVITY; HIGH ASPECT RATIO; MACROSCOPIC BODIES; MECHANICAL QUALITY FACTORS; RADIATION PRESSURE;

ASPECT RATIO; CRYSTAL RESONATORS; EXPERIMENTS; MIRRORS;

QUANTUM OPTICS;

EID: 84881179679     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/8/085010     Document Type: Article

References (49)

1. Kippenberg T J and Vahala K J 2008 Science 321 1172
2. Marquardt F and Girvin S M 2009 Physics 2 40
3. Favero I and Karrai K 2009 Nature Photon. 3 201
4. Zwickl B M, Shanks W E, Jayich A M, Yang C, Bleszynski Jayich A C, Thompson J D and Harris J G E 2008 Appl. Phys. Lett. 92 103125 (Pubitemid 351393989)
5. Anetsberger G, Riviére R, Schliesser A, Arcizet O and Kippenberg T J 2008 Nature Photon. 2 627
6. Eichenfield M, Chan J, Camacho R M, Vahala K J and Painter O 2009 Nature 462 78-82
7. Cole G D, Gröblacher S, Gugler K, Gigan S and Aspelmeyer M 2008 Appl. Phys. Lett. 92 261108
8. Gröblacher S, Hertzberg J B, Vanner M R, Cole G D, Gigan S, Schwab K C and Aspelmeyer M 2009 Nature Phys. 5 485
9. Kuhn A G et al 2011 Appl. Phys. Lett. 99 121103
10. Kleckner D, Pepper B, Jeffrey E, Sonin P, Thon S M and Bouwmeester D 2011 Opt. Express. 19 19708
11. Fabre C, Pinard M, Bourzeix S, Heidmann A, Giacobino E and Reynaud S 1994 Phys. Rev. A 49 1337
12. Mancini S and Tombesi P 1994 Phys. Rev. A 49 4055
13. Mancini S, Giovannetti V, Vitali D and Tombesi P 2002 Phys. Rev. Lett. 88 120401
14. Pinard M, Dantan A, Vitali D, Arcizet O, Briant T and Heidmann A 2005 Europhys. Lett. 72 747 (Pubitemid 41757771)
15. Vitali D, Gigan S, Ferreira A, Böhm H R, Tombesi P, Guerreiro A, Vedral V, Zeilinger A and Aspelmeyer M 2007 Phys. Rev. Lett. 98 030405 (Pubitemid 46154916)
16. Safavi-Naeini A et al 2013 arxiv:1302.6179
17. Marino F, Cataliotti F S, Farsi A, Siciliani de Cumis M and Marin F 2010 Phys. Rev. Lett. 104 073601
18. Arcizet O, Molinelli C, Briant T, Cohadon P F, Heidmann A, Mackowski J M, Michel C, Pinard L, Français O and Rousseau L 2008 New J. Phys. 10 125021
19. Klitsner T, VanCleve J E, Fischer H E and Pohl R O 1988 Phys. Rev. B 38 7576
20. Mohanty P, Harrington D A, Ekinci K L, Yang Y T, Murphy M J and Roukes M L 2002 Phys. Rev. B 66 085416
21. Liu X, Vignola J F, Simpson H J, Lemon B R, Houston B H and Photiadis D M 2005 J. Appl. Phys. 97 023524 (Pubitemid 40183029)
22. Zendri J P, Bignotto M, Bonaldi M, Cerdonio M, Conti L, Ferrario L, Liguori N, Maraner A, Serra E and Taffarello L 2008 Rev. Sci. Instrum. 79 033901 (Pubitemid 351469762)
23. Yamamoto K et al Phys. Rev. D 74 022002
24. Serra E, Borrielli A, Cataliotti F S, Marin F, Marino F, Pontin A, Prodi G A and Bonaldi M 2012 Appl. Phys. Lett. 101 071101
25. Serra E, Cataliotti F S, Marin F, Marino F, Pontin A, Prodi G A and Bonaldi M 2012 J. Appl. Phys. 111 113109
26. Waggoner P S and Craighead H G 2009 J. Appl. Phys. 105 054306
27. Sosale G, Das K, Fréchette L and Vengallatore S 2011 J. Micromech. Microeng. 21 105010
28. Borrielli A, Bonaldi M, Serra E, Bagolini A and Conti L 2011 J. Micromech. Microeng. 21 065019
29. Spiel C L, Pohl R O and Zehnder A T 2001 Rev. Sci. Instrum. 72 1482
30. Cole G D, Wilson-Rae I, Werbach K, Vanner M R and Aspelmeyer M 2011 Nature Commun. 2 231
31. Serra E, Borrielli A, Cataliotti F S, Marin F, Marino F, Pontin A, Prodi G A and Bonaldi M 2012 Phys. Rev. A 86 051801
32. Farsi A, Siciliani de Cumis M, Marino F and Marin F 2012 J. Appl. Phys. 111 043101
33. Ladouceur F 1997 J. Light. Technol. 15 1020-5
34. Anderson D Z, Frisch J C and Masser C S 1984 Appl. Opt. 23 1238-45
35. Davies H 1954 Proc. IEEE 101 209-14 http://digital-library.theiet.org/ content/journals/10.1049/pi-4.1954.0025
36. Kleiman R N, Agnolet G and Bishop D J 1987 Phys. Rev. Lett. 59 2079
37. Siciliani de Cumis M, Farsi A, Marino F, D'Arrigo G, Marin F, Cataliotti F S and Rimini E 2009 J. Appl. Phys. 106 013108
38. Mack G X and Anderson A C 1985 Phys. Rev. B 31 1102
39. Zink B L and Hellman F 2004 Solid State Commun. 129 199
40. Gardner G W and Anderson A C 1981 Phys. Rev. B 23 474
41. Chaudhuri N, Wadhwa R S, Tiku P and Sreedhar A K 1973 Phys. Rev. B 8 4668
42. Tittonen I, Breitenbach G, Kalkbernner T, Muller T, Conradt R and Schiller S 1999 Phys. Rev. A 59 1038
43. Arcizet O, Cohadon P-F, Briant T, Pinard M and Heidmann A 2006 Nature 444 71 (Pubitemid 44684756)
44. Kleckner D and Bouwmeester D 2006 Nature 444 75 (Pubitemid 44684757)
45. Groeblacher S, Hammerer K, Vanner M R and Aspelmeyer M 2009 Nature 460 724
46. Brodoceanu D, Cole G D, Kiesel N, Aspelmeyer M and Bäuerle D 2010 Appl. Phys. Lett. 97 041104
47. Cole G D, Wilson-Rae I, Vanner M R, Groblacher S, Pohl J, Zorn M, Weyers M, Peters A and Aspelmeyer M 2010 Proc. IEEE 23rd Int. Conf. on Microelectromechanical Systems p 847
48. Verlot P, Tavernarakis A, Briant T, Cohadon P-F and Heidmann A 2010 Phys. Rev. Lett. 104 133602
49. Cohadon P-F 2013 private communication