Specific heat and thermal conductivity of low-stress amorphous Si-N membranes

Solid State Communications

Volumn 129, Issue 3, 2004, Pages 199-204

  Zink, B L ^a   Hellman, F ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

A. Disordered systems; A. Thin films; D. Heat conduction

Indexed keywords

AMORPHOUS SILICON; CALORIMETERS; COMPUTER SIMULATION; HIGH TEMPERATURE EFFECTS; MEMBRANES; PHONONS; POLYCRYSTALLINE MATERIALS; PROFILOMETRY; SINTERING; SPECIFIC HEAT OF SOLIDS; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILMS;

DISORDERED SYSTEMS; PHONON SCATTERING;

SILICON NITRIDE;

EID: 0344494511     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssc.2003.08.048     Document Type: Article

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