Loss budget of a setup for measuring mechanical dissipations of silicon wafers between 300 and 4 K

Review of Scientific Instruments

Volumn 79, Issue 3, 2008, Pages

  Zendri, J P ^a   Bignotto, M ^b   Bonaldi, M ^c   Cerdonio, M ^b   Conti, L ^b   Ferrario, L ^d   Liguori, N ^b   Maraner, A ^e   Serra, E ^d   Taffarello, L ^a  

^a SEZIONE DI PADOVA   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

^c FONDAZIONE BRUNO KESSLER   (Italy)

^d ITC IRST   (Italy)

^e LABORATORI NAZIONALI DI LEGNARO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELASTIC MODULI; ENERGY DISSIPATION; NATURAL FREQUENCIES; OPTICAL SENSORS; SENSITIVITY ANALYSIS; VIBRATION MEASUREMENT;

OPTICAL VIBRATION SENSORS; WAFER CLAMPS;

SILICON WAFERS;

EID: 41549117106     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2868810     Document Type: Article

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