Controlling damping and quality factors of silicon microcantilevers by selective metallization

Journal of Micromechanics and Microengineering

Volumn 21, Issue 10, 2011, Pages

  Sosale, Guruprasad ^a   Das, Kaushik ^a   Fréchette, Luc ^b   Vengallatore, Srikar ^a  

^a MCGILL UNIVERSITY   (Canada)

^b UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM FILM; ANALYTICAL MODEL; DEVELOPING STRATEGY; ELECTRICAL CONDUCTIVITY; LOW STRAINS; MICRO RESONATORS; MICRO-CANTILEVERS; OPTICAL REFLECTIVITY; QUALITY FACTORS; SIGNIFICANT IMPACTS; SILICON MICROCANTILEVERS; SINGLE CRYSTAL SILICON; THIN METALLIC FILMS; VIBRATION ENERGY HARVESTING; VISCOUS LOSS;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DAMPING; ELECTRIC CONDUCTIVITY; MATHEMATICAL MODELS; MEMS; METALLIC FILMS; METALLIZING; RESONATORS; SCANNING PROBE MICROSCOPY; SIGNAL PROCESSING;

QUALITY CONTROL;

EID: 80053617883     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/10/105010     Document Type: Article

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