The relationship between material properties, device design, and the sensitivity of resonant mechanical sensors

Journal of Applied Physics

Volumn 105, Issue 5, 2009, Pages

  Waggoner, Philip S ^a   Craighead, Harold G ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; MECHANICAL PROPERTIES; NATURAL FREQUENCIES; RESONATORS; SENSORS;

ANALYTE; ANALYTICAL TECHNIQUES; BIOSENSING APPLICATIONS; COMPETING EFFECTS; DEVICE DESIGNS; DEVICE GEOMETRIES; FINITE-ELEMENT ANALYSIS; FLEXURAL RIGIDITIES; FREQUENCY SHIFTS; MATERIAL PROPERTIES; MECHANICAL SENSORS; MICRO-MECHANICAL RESONATORS; MICROMECHANICAL SENSORS; RESONANT FREQUENCIES; RESONANT MODES; SENSOR DESIGNS; SMALL REGIONS; SURFACE AREAS;

FREQUENCY RESPONSE;

EID: 62549098629     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3079793     Document Type: Article

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