Evidence of coexistence of micro and nanoporosity of organo-silica polymeric films deposited on silicon by plasma deposition

Materials Chemistry and Physics

Volumn 141, Issue 2-3, 2013, Pages 602-612

  Purohit, Viswas ^a   Mielczarski, Ela ^a   Mielczarski, Jerzy A ^a   Akesso, Laurent ^b  

^a Nancy University   (France)

^b TEER COATINGS LTD   (United Kingdom)

Author keywords

FTIR; Microporous materials; Plasma deposition; Polymers; XPS

Indexed keywords

CHEMICAL COMPOSITIONS; EXTERNAL REFLECTION; EXTERNAL REFLECTION FT-IR SPECTROSCOPY; FTIR; HEXAMETHYL DISILOXANE; MACROSCOPIC PROPERTIES; PLASMA POLYMERIZED FILM; RADIO FREQUENCY PLASMA REACTORS;

DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROPOROUS MATERIALS; PHOTOELECTRONS; PLASMA DEPOSITION; POLYMERS; SILICON OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS;

EID: 84881160326     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2013.04.040     Document Type: Article

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