메뉴 건너뛰기




Volumn 56, Issue 7, 2013, Pages 1740-1748

Metallurgical challenges in microelectronic 3D IC packaging technology for future consumer electronic products

Author keywords

3D IC packaging; localized heating; microbump

Indexed keywords

BINARY ALLOYS; COPPER; METALLURGY; MICROELECTRONICS; SOLDERED JOINTS; TIMING CIRCUITS; TIN ALLOYS;

EID: 84879886361     PISSN: 16747321     EISSN: 18691900     Source Type: Journal    
DOI: 10.1007/s11431-013-5261-y     Document Type: Article
Times cited : (41)

References (25)
  • 3
    • 79951951987 scopus 로고    scopus 로고
    • Reliability challenges in 3D IC packaging technology
    • 10.1016/j.microrel.2010.09.031
    • Tu K N. Reliability challenges in 3D IC packaging technology. Microelectron Reliab, 2011, 51:517-523
    • (2011) Microelectron Reliab , vol.51 , pp. 517-523
    • Tu, K.N.1
  • 4
    • 84872114131 scopus 로고    scopus 로고
    • Transition from flip chip solder joint to 3D IC microbump: Its effect on microstructure anisotropy
    • 10.1016/j.microrel.2012.07.029
    • Tu K N, Hsiao H Y, Chen C. Transition from flip chip solder joint to 3D IC microbump: Its effect on microstructure anisotropy. Microelectron Reliab, 2013, 53:2-6
    • (2013) Microelectron Reliab , vol.53 , pp. 2-6
    • Tu, K.N.1    Hsiao, H.Y.2    Chen, C.3
  • 5
    • 84866852909 scopus 로고    scopus 로고
    • Preferred orientation of 30 μm fine pitch Sn2.5Ag micro-bumps studied by synchrotron polychromatic x-ray Laue microdiffraction
    • Tian T, Chen K, Kunz M, et al. Preferred orientation of 30 μm fine pitch Sn2.5Ag micro-bumps studied by synchrotron polychromatic x-ray Laue microdiffraction. Electronic Components and Technology Conference (ECTC), 2012, 62. 882-885
    • (2012) Electronic Components and Technology Conference (ECTC) , vol.62 , pp. 882-885
    • Tian, T.1    Chen, K.2    Kunz, M.3
  • 7
    • 36849120852 scopus 로고
    • Stability of a planar interface during solidification of a dilute binary alloy
    • 10.1063/1.1713333
    • Mullins W W, Sekerka R F. Stability of a planar interface during solidification of a dilute binary alloy. J Appl Phys, 1964, 35:444-451
    • (1964) J Appl Phys , vol.35 , pp. 444-451
    • Mullins, W.W.1    Sekerka, R.F.2
  • 8
    • 84861438447 scopus 로고    scopus 로고
    • Unidirectional growth of microbumps on (111)-oriented and nanotwinned copper
    • 10.1126/science.1216511
    • Hsiao H Y, Liu C M, Lin H W, et al. Unidirectional growth of microbumps on (111)-oriented and nanotwinned copper. Science, 2012, 336:1007-1010
    • (2012) Science , vol.336 , pp. 1007-1010
    • Hsiao, H.Y.1    Liu, C.M.2    Lin, H.W.3
  • 9
    • 34547677920 scopus 로고    scopus 로고
    • 5 formed on (001) single crystal copper in reaction between molten SnPb solder and Cu
    • 10.1063/1.2761840
    • 5 formed on (001) single crystal copper in reaction between molten SnPb solder and Cu. Appl Phys Lett, 2007, 91: 051907
    • (2007) Appl Phys Lett , vol.91 , pp. 051907
    • Suh, J.O.1    Tu, K.N.2    Tamura, N.3
  • 10
    • 44449117311 scopus 로고    scopus 로고
    • 5 grains formed between molten Sn and Cu single crystals
    • 10.1016/j.actamat.2008.01.055
    • 5 grains formed between molten Sn and Cu single crystals. Acta Mat, 2008, 56:2649-2662
    • (2008) Acta Mat , vol.56 , pp. 2649-2662
    • Zou, H.F.1    Yang, H.J.2    Zhang, Z.F.3
  • 11
    • 4544358607 scopus 로고    scopus 로고
    • Ultrahigh strength and high electrical conductivity in copper
    • 10.1126/science.1092905
    • Lu L, Shen Y, Chen X, et al. Ultrahigh strength and high electrical conductivity in copper. Science, 2004, 304:422-426
    • (2004) Science , vol.304 , pp. 422-426
    • Lu, L.1    Shen, Y.2    Chen, X.3
  • 12
    • 59149091661 scopus 로고    scopus 로고
    • Revealing the maximum strength in nanotwinned copper
    • 10.1126/science.1167641
    • Lu L, Chen X, Huang X, et al. Revealing the maximum strength in nanotwinned copper. Science, 2009, 323:607-610
    • (2009) Science , vol.323 , pp. 607-610
    • Lu, L.1    Chen, X.2    Huang, X.3
  • 13
    • 51349169387 scopus 로고    scopus 로고
    • Epitaxial nanotwinned Cu films with high strength and high conductivity
    • 10.1063/1.2969409
    • Anderoglu O, Misra A, Wang H, et al. Epitaxial nanotwinned Cu films with high strength and high conductivity. Appl Phys Lett, 2008, 93:083108
    • (2008) Appl Phys Lett , vol.93 , pp. 083108
    • Anderoglu, O.1    Misra, A.2    Wang, H.3
  • 14
    • 43949085395 scopus 로고    scopus 로고
    • Thermal stability of sputtered Cu films with nanoscale growth twins
    • 10.1063/1.2913322
    • Anderoglu O, Misra A, Wang H, et al. Thermal stability of sputtered Cu films with nanoscale growth twins. J Appl Phys, 2008, 103:094322
    • (2008) J Appl Phys , vol.103 , pp. 094322
    • Anderoglu, O.1    Misra, A.2    Wang, H.3
  • 15
    • 19944432174 scopus 로고    scopus 로고
    • Kirkendall void formation in eutectic SnPb solder joints on bare Cu and its effect on joint reliability
    • 10.1063/1.1839637
    • Zeng K, Stierman R, Chiu T C, et al. Kirkendall void formation in eutectic SnPb solder joints on bare Cu and its effect on joint reliability. J Appl Phys, 2005, 97:024508
    • (2005) J Appl Phys , vol.97 , pp. 024508
    • Zeng, K.1    Stierman, R.2    Chiu, T.C.3
  • 16
    • 79951623144 scopus 로고    scopus 로고
    • Development of 30 μm pitch Cu/Ni/SnAg micro-bump-bonded chip-on-chip interconnections
    • Juang J Y, Lu S T, Zhan C J, et al. Development of 30 μm pitch Cu/Ni/SnAg micro-bump-bonded chip-on-chip interconnections. Proc. IEEE IMPACT, 2010. 1-4
    • (2010) Proc. IEEE IMPACT , pp. 1-4
    • Juang, J.Y.1    Lu, S.T.2    Zhan, C.J.3
  • 17
    • 0000844106 scopus 로고
    • Self-propagating explosive reaction in Al/Ni multilayer thin films
    • 10.1063/1.103504
    • Ma E, Thompson C V, Clevenger L A, et al. Self-propagating explosive reaction in Al/Ni multilayer thin films. Appl Phys Lett, 1990, 57:1262-1264
    • (1990) Appl Phys Lett , vol.57 , pp. 1262-1264
    • Ma, E.1    Thompson, C.V.2    Clevenger, L.A.3
  • 18
    • 0001753197 scopus 로고
    • Propagation of explosive crystallization in thin Rh-Si multilayer films
    • 10.1116/1.573848
    • Floro J A. Propagation of explosive crystallization in thin Rh-Si multilayer films. J Vac Sci Technol A-Vac Surf Films, 1986, 4:631-636
    • (1986) J Vac Sci Technol A-Vac Surf Films , vol.4 , pp. 631-636
    • Floro, J.A.1
  • 19
    • 0042099168 scopus 로고
    • Explosive silicidation in nickel/amorphous-silicon multilayer thin films
    • 10.1063/1.345429
    • Clevenger L A, Thompson C V, Tu K N. Explosive silicidation in nickel/amorphous-silicon multilayer thin films. J Appl Phys, 1990, 67:2894-2898
    • (1990) J Appl Phys , vol.67 , pp. 2894-2898
    • Clevenger, L.A.1    Thompson, C.V.2    Tu, K.N.3
  • 20
    • 0013111471 scopus 로고
    • Explosive crystallization in zirconium/ silicon multilayers
    • 10.1116/1.575315
    • Wickersham C E, Poole J E. Explosive crystallization in zirconium/ silicon multilayers. J Vac Sci Tech A-Vac Surf Films, 1988, 6:1699-1702
    • (1988) J Vac Sci Tech A-Vac Surf Films , vol.6 , pp. 1699-1702
    • Wickersham, C.E.1    Poole, J.E.2
  • 21
    • 0025399291 scopus 로고
    • Quantitative investigation of Ti/amorphous-Si multilayer thin film reactions
    • 10.1557/JMR.1990.0593
    • De Avillez R R, Clevenger L A, Thompson C V, et al. Quantitative investigation of Ti/amorphous-Si multilayer thin film reactions. J Mater Res, 1990, 5:593-600
    • (1990) J Mater Res , vol.5 , pp. 593-600
    • De Avillez, R.R.1    Clevenger, L.A.2    Thompson, C.V.3
  • 23
    • 0000444236 scopus 로고    scopus 로고
    • Effect of intermixing on self-propagating exothermic reactions in Al/Ni nanolaminate foils
    • 10.1063/1.372005
    • Gavens A J, Van Heerden D, Mann A B, et al. Effect of intermixing on self-propagating exothermic reactions in Al/Ni nanolaminate foils. J Appl Phys, 2000, 87:1255-1263
    • (2000) J Appl Phys , vol.87 , pp. 1255-1263
    • Gavens, A.J.1    Van Heerden, D.2    Mann, A.B.3
  • 24
    • 4544322755 scopus 로고    scopus 로고
    • Investigating the effect of applied pressure on reactive multilayer foil joining
    • 10.1016/j.actamat.2004.07.012
    • Wang J, Besnoin E, Knio O M, et al. Investigating the effect of applied pressure on reactive multilayer foil joining. Acta Mat, 2004, 52:5265-5274
    • (2004) Acta Mat , vol.52 , pp. 5265-5274
    • Wang, J.1    Besnoin, E.2    Knio, O.M.3
  • 25
    • 42149171209 scopus 로고    scopus 로고
    • Solder joints fabricated by explosively reacting nanolayers
    • 10.1063/1.2907850
    • Tong M S, Sturgess D, Tu K N, et al. Solder joints fabricated by explosively reacting nanolayers. Appl Phys Lett, 2008, 92:144101
    • (2008) Appl Phys Lett , vol.92 , pp. 144101
    • Tong, M.S.1    Sturgess, D.2    Tu, K.N.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.