Capillary self-alignment of polygonal chips: A generalization for the shift-restoring force

Microfluidics and Nanofluidics

Volumn 14, Issue 5, 2013, Pages 845-858

  Berthier, Jean ^a   Mermoz, Sébastien ^b   Brakke, Kenneth ^c   Sanchez, Loic ^a   Frétigny, Christian ^d   Cioccio, Léa Di ^a  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

^c Susquehana University   (United States)

^d Centre National de la Recherche Scientifique   (France)

Author keywords

3 D microelectronics; Capillarity; Polygonal chip; Self alignment; Shift restoring force

Indexed keywords

ANISOTROPIC BEHAVIORS; APPROXIMATE EXPRESSIONS; MICRO-SYSTEM PACKAGING; POLYGONAL CHIP; SELF ALIGNMENT; SHIFT-RESTORING FORCE; SURFACE EVOLVER SOFTWARE; SURFACE TENSION FORCE;

CAPILLARITY; MICROELECTRONICS; SURFACE TENSION;

ALIGNMENT;

EID: 84877804996     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-012-1114-4     Document Type: Article

References (32)

1. Arutinov G, Smit ECP, Mastrangeli M, van Heck G, van den Brand J, School HFM, Dietzel A (2012) Capillary self-alignment of mesoscopic foil components for sensor-systems-in-foil. J Micromec Microeng 22:115022. doi: 10.1088/0960-1317/22/11/115022
2. Avital A, Zussman E (2006) Fluidic assembly of optical components. IEEE Trans Adv Packag 29(4):719-724. doi: 10.1109/TADVP.2006.884810
3. Berthier J, Brakke K (2012) The physics of microdrops. Scrivener-Wiley publishing. doi: 10.1002/9781118401323
4. Berthier J, Brakke K, Grossi F, Sanchez L, Di Cioccio L (2010) Self-alignment of silicon chips on wafers: a capillary approach. JAP 108:054905. doi: 10.1063/1.3466782
5. Berthier J, Brakke K, Mermoz S, Sanchez L, Frétigny C, Di Cioccio L (2011) Self-alignment of silicon chips on wafers: a numerical investigation of the effect of spreading and wetting. Sens Transducers J 13:44-52
6. Böhringer KF (2008) Engineered self-assembly from nano to milli scales, in Multi-material micro manufacture. In: Dimov S, Menz W (eds) Whittles Publishing Ltd. doi: 10.3850/978-981-6555
7. Böhringer KF, Srinivasan U, Howe RT (2001) Modeling of capillary forces and binding sites for fluidic self-assembly. Int Conf Micro Electro Mech Syst. doi: 10.1.1.32.8332
8. Boncheva M, Bruzewicz DA, Whitesides GM (2003) Millimeter-scale self-assembly and its applications. Pure Appl Chem 75(5):621-630. doi: 10.1109/MEMSYS.2012.5442454
9. Brakke K (1992) The surface evolver. Exp Math 1(2):141-165
10. Chang B, Sariola V, Aura S, Ras RHA, Klonner M, Lipsanen H, Zhou Q (2011) Capillary-driven self-assembly of microchips on oleophilic/oleophobic patterned surface using adhesive droplet in ambient air. APL 99:034104. doi: 10.1063/1.3615053
11. Fukushima T, Tanaka T, Koyanagi M (2009) 3D system integration technology and 3D systems. In: Advanced metallization conference proceedings, pp 479-485
12. Fukushima T, Konno T, Iwata E, Kobayashi R, Kojima T, Murugesan M, Bea J-C, Lee K-W, Tanaka T, Koyanagi M (2011) Self-assembly of chip-size components with cavity structures: high-precision alignment and direct bonding without thermal compression for hetero integration. Micromachine 2:49-68. doi: 10.3390/mi2010049
13. Knuesel RJ, Jacobs HO (2010) Self-assembly of microscopic chiplets at a liquid-liquid-solid interface forming a flexible segmented monocrystalline solar cell. PNAS 107(3):993. doi: 10.1073/pnas.0909482107
14. Lambert P, Mastrangeli M, Valsamis J-B, Degrez G (2010) Spectral analysis and experimental study of lateral capillary dynamics for flip-chip applications. Microfluid Nanofluid 9:797-807. doi: 10.1007/s10404-010-0595-2
15. Lee SH, Chen K-N, Lu JJ-Q (2011) Wafer-to-wafer alignment for three-dimensional integration: a review. J Microelec Syst 20(4):885. doi: 10.1109/MEMS.2011.2148161
16. Lienemann J, Greiner A, Korvink JG (2004) Modeling, simulation, and experimentation of a promising new packaging technology: parallel fluidic self-assembly of microdevices. In: Baltes H, Fedder GK, Korvink JG (eds) Sensors update, vol 13. Wiley-VCH Verlag
17. Martin BR, Furnange DC, Jackson TN, Mallouk TE, Mayer TS (2001) Self-alignment of patterned wafers using capillary forces at a water-air interface. Adv Funct Mater 11(5):381-386. doi: 10.1002/1616-3028(200110)11:5
18. Mastrangeli M, Abbasi S, Varel C, Van Hoof C, Celis J-P, Böhringer KF (2009) Self-assembly from milli- to nanoscales: methods and applications. J Micromech Microeng 19:083001. doi: 10.1088/0960-1317/19/8/083001
19. Mermoz S, Sanchez L, Di Cioccio L, Berthier J, Deloffre E, Fretigny C (2011) Impact of containment and deposition method on sub-micron chip-to-wafer self-assembly yield. In: Proceedings of the 3DIC conference, Osaka, Japon, January 31-February 2
20. Moriceau H, Rieutord F, Fournel F, Le Tiec Y, Di Cioccio L, Morales C, Charvet AM, Deguet D (2010) Overview of recent direct wafer bonding advances and applications. Adv Nat Sci Nanosci Nanotechnol 1:043004. doi: 10.1088/2043-6262/1/4/043004
21. Pelesko JA (2007) Self-assembly: the science of things that put themselves together. Chapman and Hall/CRC, London
22. Sariola V, Jääskeläinen M, Zhou Q (2010) Hybrid microassembly combining robotics and water droplet self-alignment. IEEE Trans Rob 26(6):965
23. Sariola V, Liimatainen V, Tolonen T, Udd R, Zhou Q (2011) Silicon capillary gripper with self-alignment capability. In: 2011 IEEE international conference on robotics and automation, Shanghai International Conference center, May 9-13, 2011, Shanghai, China
24. Srinivasan U, Liepmann D, Howe RT (2001) Microstructure to substrate self-assembly using capillary forces. J Microelectromech Syst 10:17-24. doi: 10.1109/84.911087
25. Stauth SA, Parviz BA (2006) Self-assembled single-crystal silicon circuits on plastic. PNAS 103(38):13922. doi: 10.1073/pnas.0602893103
26. Takei A, Yoshihata Y, Shimoyama I (2011) Microprism using capillary alignment. J Micromech Microeng 21:085009. doi: 10.1088/0960-1317/21/8/085009
27. Tong QY, Gösele U (1999) Semiconductor wafer bonding. Wiley, Hoboken. doi: 10.1146/annurev.matsci.28.1.215
28. Wang ZQ, Wang FC, Zhao YP (2012) Tap dance of water droplet. Proc R Soc A 468:2485-2495. doi: 10.1098/rspa.2011.0679
29. Weisstein EW (2012) Star Polygon. MathWorld - A Wolfram Web Resource. http://mathworld.wolfram.com/StarPolygon.html
30. Whitesides GM, Boncheva M (2002) Beyond molecules: self-assembly of mesoscopic and macroscopic components. PNAS 99:4769-4774. doi: 10.1073/pnas.082065899
31. Zhang XJ, Chen CC, Bernstein RW, Zappe S, Scott MP, Solgaard O (2005) Microoptical characterization and modeling of positioning forces on drosophila embryos self-assembled in two-dimensional arrays. J Microelectromech Syst 14(5):1187. doi: 10.1109/JMEMS.2005.851834
32. Zheng W, Jacobs HO (2005) Fabrication of multicomponent microsystems by directed three-dimensional self-assembly. Adv Funct Mater 15:732. doi: 10.1002/adfl.200400595