Microprism using capillary alignment

Journal of Micromechanics and Microengineering

Volumn 21, Issue 8, 2011, Pages

  Takei, Atsushi ^a   Yoshihata, Yuta ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APEX ANGLES; CAPILLARY FORCE; CIRCULAR PLATES; INTERNAL PRESSURE; MICROPRISMS; PARYLENE MEMBRANES; SILICONE OIL; THREE-DIMENSIONAL STRUCTURE; TWO PLATES;

PRISMS; SILICONES; SURFACE PROPERTIES; SURFACE TENSION; THREE DIMENSIONAL;

PLATES (STRUCTURAL COMPONENTS);

EID: 80051526071     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/8/085009     Document Type: Article

References (24)

1. Mastrangeli M, Valsamis J B, Van Hoof C, Celis J P and Lambert P 2010 Lateral capillary forces of cylindrical fluid menisci: a comprehensive quasi-static study J. Micromech. Microeng. 20 075041
2. Sriniavsan U, Liepmann D and Howe R T 2001 Microstructure to substrate self-assembly using capillary force J. Microelectromech. Syst. 10 17-24 (Pubitemid 32287836)
3. Xiong X, Hanein Y, Fang J, Wang Y, Wang W, Schwartz D T and Böhringer K F 2003 Controlled multi-batch self-assembly of micro devices J. Microelectromech. Syst. 12 117-27
4. Lienemann J, Greiner A, Korvink J G, Xiong X, Hanein Y and Böhringer K F 2003 Modelling, simulation and experimentation of a promising new packaging technology - parallel fluidic self-assembly of micro devices Sensors Update 13 3-43
5. Takei A, Matsumoto K and Shimoyama I 2010 Capillary torque caused by a liquid droplet sandwiched between two plates Langmuir 26 2497-504
6. Gracias D H, Kavthekar V, Love J C, Paul K E and Whitesides G M 2002 Fabrication of micrometer-scale, patterned, polyhedra by self-assembly Adv. Mater. 14 235-8 (Pubitemid 34148984)
7. Py C, Reverdy P, Doppler L, Bico J, Roman B and Baroud C N 2007 Capillary origami: spontaneous wrapping of a droplet with an elastic sheet Phys. Rev. Lett. 98 156103
8. Berge B and Peseux J 2000 Variable focal lens controlled by an external voltage: an application of electrowetting Eur. Phys. J. E 3 159-63
9. Kilaru M, Yang J and Heikenfeld J 2009 Advanced characterization of electrowetting retroreflectors Opt. Express 17 17563-9
10. Hayes R A and Feenstra B J 2003 Video-speed electronic paper based on electrowetting Nature 425 383-5 (Pubitemid 37187263)
11. Strandman C, Rosengren L, Elderstig H G A and Bcklund Y 1996 Fabrication of 45° mirrors together with well-designed v-grooves using wet anisotropic etching of silicon J. Microelectromech. Syst. 4 213-9
12. Hosokawa K, Shimoyama I and Miura H 1996 Two-dimensional micro-self-assembly using the surface tension of water Sensors Actuators A 57 117-25 (Pubitemid 126371391)
13. Bowden N, Choi I S, Grzybowski B A and Whitesides G M 1999 Mesoscale self-assembly of hexagonal plates using lateral capillary forces: synthesis using the 'Capillary Bond' J. Am. Chem. Soc. 121 5373-91
14. Zeng H, Wan Z, Fang J and Feinerman A D 2006 Tilting micromirror with a liquid-metal pivot J. Microelectromech. Syst. 15 1568-75 (Pubitemid 44921775)
15. Nguyen B K, Matsumoto K and Shimoyama I 2008 Polymer thin film deposited on liquid for varifocal encapsulated liquid lenses Appl. Phys. Lett. 93 124101
16. Nguyen B K, Matsumoto K and Shimoyama I 2010 Thin film stress of parylene deposited on liquid Langmuir 26 18771-5
17. Smith N, Abeysinghe D, Heikenfeld J and Haus J W 2006 Agile wide-angle beam steering with electrowetting microprisms Opt. Express 14 6557-63 (Pubitemid 44036389)
18. Müller P, Spengler N, Zappe H and Mönch W 2010 An optofluidic concept for a tunable micro-iris J. Microelectromech. Syst. 19 1477-84
19. Langbein D 2004 Capillary Surfaces Shape-Stability-Dynamics in Particular Under Weightlessness (New York: Springer)
20. Bellex International, Cytop Data Sheet. Available at: http://www.bellexinternational.com
21. Brakke K A 1992 The surface evolver Exp. Math. 1 141-65
22. Yoshihata Y, Nguyen B K, Takei A, Iwase E, Matsumoto K and Shimoyama I 2008 Scanning micromirror using deformation of a Parylene-encapsulated liquid structure Proc. 2008 IEEE Int. Conf. MEMS pp 770-3
23. Homola J, Koudela I and Yee S S 1999 Surface plasmon resonance sensors based on diffraction gratings and prism couplers: sensitivity comparison Sensors Actuators A 54 16-24
24. Yoshihata Y, Takei A, Nguyen B K, Kan T, Iwase E, Matsumoto K and Shimoyama I 2009 Micro liquid prism Proc. 2009 IEEE Int. Conf. MEMS pp 967-70