Investigation of aluminum-gallium co-doped zinc oxide targets for sputtering thin film and photovoltaic application

Journal of Alloys and Compounds

Volumn 575, Issue , 2013, Pages 174-182

  Liu, Jia ^a   Zhang, Weijia ^a   Song, Dengyuan ^b   Ma, Qiang ^a   Zhang, Lei ^b   Zhang, Hui ^b   Zhang, Leng ^a   Wu, Ransong ^a  

^a BEIHANG UNIVERSITY   (China)

^b Yingli Solar ^*  (China)

Author keywords

Electronic properties; Microstructure; Powder metallurgy; Sintering

Indexed keywords

ALUMINUM; CARRIER CONCENTRATION; CERAMIC MATERIALS; ELECTRONIC PROPERTIES; ENERGY GAP; GALLIUM; MICROSTRUCTURE; NANOCRYSTALLINE SILICON; POWDER METALLURGY; PRECIPITATION (CHEMICAL); SEMICONDUCTOR DOPING; SILICON; SILICON SOLAR CELLS; SINTERING; SOLAR CELLS; ZINC OXIDE;

AZO THIN FILMS; CHEMICAL COPRECIPITATION METHOD; DOPING CONCENTRATION; ITS APPLICATIONS; NANOCRYSTALLINE SI; PHOTOVOLTAIC APPLICATIONS; SI SOLAR CELLS; TRANSPARENT THIN FILM;

THIN FILMS;

EID: 84877606387     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2013.04.075     Document Type: Article

References (28)

1. C.P. Liu, G.R. Jeng, Properties of aluminum doped zinc oxide materials and sputtering thin films, J. Alloys Comp. 468 (2009) 343-349
2. R.F. Silva, E.D. Zaniquelli, Aluminum-doped zinc oxide films prepared by an inorganic sol-gel route, Thin Solid Films 449 (2004) 86-93
3. T. Minami, Present status of transparent conducting oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes, Thin Solid Films 516 (2008) 5822-5828
4. C.P. Liu, Y.T. Hung, The effect of thermal annealing and evaporating vacuum level on the performance of a polyfluorene-based polymer light emitting diode, Thin Solid Films 492 (2005) 269-274 (Pubitemid 41383730)
5. T. Takaki, K. Kurosawa, H. Razavi, S. Sukenaga, N. Saito, K. Kaneko, K. Nakashima, T. Hiraaki, Electrolytic synthesis of Al-doped ZnO nanopowders with low electrical resistivity, J. Am. Ceram. Soc. 93 (2010) 3088-3091
6. D.K. Kim, H.B. Kim, Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressure, J. Alloys Comp. 509 (2011) 421-425
7. N. Neves, R. Barros, E. Antunes, J. Calado, E. Fortunato, R. Martins, I. Ferreira, Aluminum doped zinc oxide sputtering targets obtained from nanostructured powders: processing and application, J. Eur. Ceram. Soc. 32 (2012) 4381-4391
8. R. Bel Hadj Tahar, Structural and electrical properties of aluminum-doped zinc oxide films prepared by sol-gel process, J. Eur. Ceram. Soc. 25 (2005) 3301-3306 (Pubitemid 41086656)
9. R. Bel Hadj Tahar, N. Bel Hadj Tahar, Crystallographic orientation in pure and aluminum-doped zinc oxide thin films prepared by sol-gel technique, J. Am. Ceram. Soc. 88 (2005) 1725-1728
10. H. Gó mez-Pozos, A. Maldonado, M. de la L. Olvera, Effect of the [Al/Zn] ratio in the starting solution and deposition temperature on the physical properties of sprayed ZnO:Al thin films, Mater. Lett. 61 (2007) 1460-1464 (Pubitemid 46290672)
11. J.D. Kim, J.H. Yun, Y.C. Park, W.A. Anderson, Transparent and crystalline Aldoped ZnO film-embedded heterojunction Si solar cell, Mater. Lett. 75 (2012) 99-101
12. T. Minami, Transparent conducting oxide semiconductors for transparent electrodes, Semicond. Sci. Technol. 20 (2005) 35-44
13. J. Nomoto, J. Konagai, T. Miyata, T. Minami, Resistivity characteristics of transparent conducting impurity-doped ZnO films for use in oxidizing environments at high temperatures, J. Vac. Sci. Technol. A 28 (2010) 861-866
14. W. Lee, S. Shin, D.R. Jung, J. Kim, C. Nahm, T. Moon, B. Park, Investigation of electronic and optical properties in Al-Ga codoped ZnO thin films, Curr. Appl. Phys. 12 (2012) 628-631
15. B.C. Kim, J.H. Lee, J.J. Kim, T. Ikegami, Rapid rate sintering of nanocrystalline indium tin oxide ceramics: particle size effect, Mater. Lett. 52 (2002) 114-119 (Pubitemid 33060582)
16. S.K. Neogi, R. Ghosh, G.K. Paul, S.K. Bera, S. Bandyopadhyay, Effects of Co doping on structural, morphological and transport properties of sol-gel AZO thin films, J. Alloys Comp. 487 (2009) 269-273
17. 3 target by slip casting, J. Am. Ceram. Soc. 92 (2009) 2168-2171
18. J. Han, P.Q. Mantas, A.M.R. Senos, Densification and grain growth of Al-doped ZnO, J. Mater. Res. 16 (2001) 459-468 (Pubitemid 34574258)
19. M.S. Jang, M.K. Ryu, M.H. Yoon, S.H. Lee, H.K. Kim, A. Onodera, S. Kojima, A study on the Raman spectra of Al-doped and Ga-doped ZnO ceramics, Curr. Appl. Phys. 9 (2009) 651-657
20. M.W. Wu, D.S. Liu, Y.H. Su, The densification, microstructure, and electrical properties of aluminum-doped zinc oxide sputtering target for transparent conductive oxide film, J. Eur. Ceram. Soc. 32 (2012) 3265-3275
21. T. Minami, J.I. Oda, J.I. Nomoto, T. Miyata, Effect of target properties on transparent conducting impurity-doped ZnO thin films deposited by DC magnetron sputtering, Thin Solid Films 519 (2010) 385-390
22. S. Lee, D. Cheon, W.J. Kim, M.H. Ham, W. Lee, Ga-doped ZnO films deposited with varying sputtering powers and substrate temperatures by pulsed DC magnetron sputtering and their property improvement potentials, Appl. Surf. Sci. 17 (2012) 6537-6544
23. G.J. Fang, D.J. Li, B.L. Yao, Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering, Vacuum 68 (2003) 363-372
24. J. Nomoto, M. Konagai, K. Okada, T. Ito, T. Miyata, T. Minami, Comparative study of resistivity characteristics between transparent conducting AZO and GZO thin films for use at high temperatures, Thin Solid Films 518 (2010) 2937-2940
25. J.G. Lu, S. Fujita, T. Kawaharamura, H. Nishinaka, Y. Kamada, T. Ohshima, Z.Z. Ye, Y.J. Zeng, Y.Z. Zhang, L.P. Zhu, H.P. He, B.H. Zhao, Carrier concentration dependence of band gap shift in n-type ZnO:Al films, J. Appl. Phys. 101 (2007) 083705
26. P. Banerjee, W.J. Lee, K.R. Bae, S. Lee, G.W. Rubloff, Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films, J. Appl. Phys. 108 (2010) 043504
27. D.K. Kim, H.B. Kim, Dependence of the properties of sputter deposited Aldoped ZnO thin films on base pressure, J. Alloys Comp. 522 (2012) 69-73
28. O. Lupan, S. Shishiyanu, V. Ursaki, H. Khallaf, L. Chow, T. Shishiyanu, V. Sontea, E. Monaico, S. Railean, Synthesis of nanostructured Al-doped zinc oxide films on Si for solar cells applications, Sol. Energy Mater. Sol. Cells 93 (2009) 1417-1422.