Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding

Journal of Applied Physics

Volumn 113, Issue 12, 2013, Pages

  El Atwani, Osman ^a   Gonderman, Sean ^b   Demasi, Alexander ^c   Suslova, Anastassiya ^b   Fowler, Justin ^b   El Atwani, Mohamad ^b   Ludwig, Karl ^c   Paul Allain, Jean ^a,b  

^a PURDUE UNIVERSITY   (United States)

^b Purdue University   (United States)

^c USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GRAZING INCIDENCE SMALL-ANGLE X-RAY SCATTERING; ION BEAM IRRADIATION; IRRADIATION PROCESS; MASS REDISTRIBUTION; NANOSTRUCTURE FORMATION; REAL TIME MEASUREMENTS; SILICIDE FORMATION; THRESHOLD CONDITION;

BINDING ENERGY; IRRADIATION; METAL COATINGS; NANOSTRUCTURES; NICKEL; PHASE SEPARATION; REMOVAL; SILICON; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

SILICIDES;

EID: 84875769636     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4797480     Document Type: Article

References (53)

1. S. Facsko, T. Dekorsy, C. Koerdt, C. Trappe, H. Kurz, A. Vogt, and H. L. Hartnagel, Science 285, 1551 (1999). 10.1126/science.285.5433.1551
2. O. El-Atwani, J. P. Allain, A. Cimaroli, A. Suslova, and S. Ortoleva, J. Appl. Phys. 110, 074301 (2011). 10.1063/1.3642997
3. S. Le Roy, E. Sondergard, I. S. Nerbo, M. Kildemo, and M. Plapp, Phys. Rev. B 81, 161401(R) (2010). 10.1103/PhysRevB.81.161401
4. R. Mark Bradley, Phys. Rev. B 85, 115419 (2012). 10.1103/PhysRevB.85. 115419
5. B. Ziberi, M. Cornejo, F. Frost, and B. Rauschenbach, J. Phys. Condens. Matter 21, 224003 (2009). 10.1088/0953-8984/21/22/224003
6. G. Carter, V. Vishnyakov, Yu. V. Martynenko, and M. J. Nobes, J. Appl. Phys. 78, 3559 (1995). 10.1063/1.359931
7. G. Carter and V. Vishnyakov, Phys. Rev. B 54, 17647 (1996). 10.1103/PhysRevB.54.17647
8. R. Gago, L. Vázquez, R. Cuerno, M. Varela, C. Ballesteros, and J. M. Albella, Appl. Phys. Lett. 78, 3316 (2001). 10.1063/1.1372358
9. G. Ozaydin, A. Ozcan, Y. Wang, K. F. Ludwig, Jr., H. Zhou, R. Headrick, and P. Siddons, Appl. Phys. Lett. 87, 163104 (2005). 10.1063/1.2099521
10. J. A. Sanchez-Garcia, L. Vazquez, R. Gago, A. Redondo-Cubero, J. M. Albella, and Z. Czigany, Nanotechnology 19, 355306 (2008). 10.1088/0957-4484/19/ 35/355306
11. J. Zhou, S. Facsko, M. Lu, and W. Möller, J. Appl. Phys. 109, 104315 (2011). 10.1063/1.3585796
12. G. Ozaydin-Ince and K. F. Ludwig, Jr., J. Phys.: Condens. Matter 21, 224008 (2009). 10.1088/0953-8984/21/22/224008
13. S. A. Norris, J. Samela, L. Bukonte, M. Backman, D. F. K. Nordlund, C. S. Madi, M. P. Brenner, and M. J. Aziz, Nat. Commun. 2, 276 (2011). 10.1038/ncomms1280
14. C. S. Madi and M. J. Aziz, Appl. Surf. Sci. 258, 4112-4115 (2012). 10.1016/j.apsusc.2011.07.143
15. G. K. Wehner, J. Vac. Sci. Technol. A 3, 1821 (1985). 10.1116/1.573386
16. G. K. Wehner and D. J. Hajicek, J. Appl. Phys. 42, 1145 (1971). 10.1063/1.1660158
17. G. Ozaydin, K. F. Ludwig, Jr., H. Zhou, L. Zhou, and R. L. Headrick, J. Appl. Phys. 103, 033512 (2008). 10.1063/1.2837101
18. G. Ozaydin, K. F. Ludwig, Jr., H. Zhou, and R. L. Headrick, J. Vac. Sci. Technol, B 26, 551 (2008). 10.1116/1.2870222
19. M. Feix, A. K. Hartmann, R. Kree, J. Munoz-Garcia, and R. Cuerno, Phys. Rev. B 71, 125407 (2005). 10.1103/PhysRevB.71.125407
20. R. M. Bradley and P. D. Shipman, Appl. Surf. Sci. 258, 4161-4170 (2012). 10.1016/j.apsusc.2011.07.003
21. J. Zhou and M. Lu, Phys. Rev. B 82, 125404 (2010). 10.1103/PhysRevB.82. 125404
22. R. Mark Bradley, Phys. Rev. B 83, 195410 (2011). 10.1103/PhysRevB.83. 195410
23. R. M. Bradley and J. M. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988). 10.1116/1.575561
24. R. Takizawa, T. Nakanishi, and A. Ohsawa, J. Appl. Phys. 62 (12), 4933 (1987). 10.1063/1.339822
25. A. Y. Usenko, U.S. patent 6,368,938 (2002).
26. O. El-Atwani, S. Ortoleva, A. Cimaroli, and J. P. Allain, Nanoscale Res. Lett. 6, 403, (2011). 10.1186/1556-276X-6-403
27. O. El-Atwani, A. Suslova, A. DeMasi, S. Gonderman, J. Fowler, M. El-Atwani, K. Ludwig, and J. P. Allain, Appl. Phys. Lett. 101, 263104 (2012). 10.1063/1.4773202
28. J. F. Ziegler, see www.srim.org for SRIM-2008 software package.
29. S. K. Sinha, E. B. Sirota, S. Garoff, and H. B. Stanley, Phys. Rev. B 38, 2297 (1988). 10.1103/PhysRevB.38.2297
30. G. Renaud, R. Lazzari, and F. Leroy, Surf. Sci. Rep. 64, 255-380 (2009). 10.1016/j.surfrep.2009.07.002
31. R. Khalfaoui, C. Benazzouz, A. Guittoum, N. Tabet, and S. Tobbeche, Vacuum 81, 45-48 (2006). 10.1016/j.vacuum.2006.02.008
32. S. Kumar, P. K. Sahoo, R. S. Chauhan, D. Kabiraj, U. Tiwari, D. Varma, and D. K. Avasthi, Nucl. Instrum Methods Phys. Res. B 212, 238-241 (2003). 10.1016/S0168-583X(03)01738-5
33. R. P. Anantatmula, A. A. Johnson, S. P. Gupta, and R. J. Horylev, J. Electron. Mater. 4, 445 (1975). 10.1007/BF02666229
34. R. Castanet, R. Chastel, and C. Bergman, Mater. Sci. Eng. 32, 93-98 (1978). 10.1016/0025-5416(78)90215-X
35. B. Legendre, C. Souleau, C. Hancheng, and N. Rodier, J. Chem. Res. (S) 5, 168 (1978).
36. P. A. Dowben and A. Miller, Surface Segregation Phenomena (CRC, Florida, 1990).
37. S. Macko, F. Frost, M. Engler, D. Hirsch, T. Hoche, J. Grenzer, and T. Michely, New J. Phys. 13, 073017 (2011). 10.1088/1367-2630/13/7/073017
38. Y. Cao, L. Nyborg, and U. Jelvestam, Surf. Interface Anal. 41, 471-483 (2009). 10.1002/sia.3050
39. B. Egert and G. Panzner, Phys. Rev. B 29, 2091 (1984). 10.1103/PhysRevB.29.2091
40. M. Nikolaeva, M. Sendova-Vasshileva, D. Dimova-Malinovska, D. Karpuzov, J. C. Pivin, and G. Beshkov, Vacuum 69, 221-225 (2002). 10.1016/S0042-207X(02) 00335-4
41. M. E. Schlesinger, Chem. Rev. 90, 607-628 (1990). 10.1021/cr00102a003
42. W. Oelsen, S. Himmelstjerna, and H. von, Mitt. Kaiser-Wilhelm Inst. Eisenforch. Duesseldorf 18, 131 (1936).
43. W. Oelsen and W. Middel, Mitt. Kaiser-Wilhelm Inst. Eisenforch. Duesseldorf 19, 1 (1937).
44. L. Topor and O. J. Kleppa, Z. Metallkd. 77, 65 (1986).
45. F. Sommer, J. Therm. Anal. 33, 15 (1988). 10.1007/BF01914580
46. B. Jounel, J.-C. Mathieu, and P. Desre, C. R. Seances Acad. Sci., Ser. C 266, 773 (1968).
47. O. S. Gorelkin and S. V. Mikhailov, Russ. J. Phys. Chem. (Engl.Transl.) 45, 1523 (1971);
48. O. S. Gorelkin and S. V. Mikhailov, Zh. Fiz. Khim 45, 2682 (1971).
49. D. Ludecke, CALPHAD: Comput. Coupling Phase Diagrams Thermochem. 11, 135 (1987). 10.1016/0364-5916(87)90005-8
50. S. Le Roy, E. Barthel, N. Brun, A. Lelarge, and E. Sondergard, J. Appl. Phys. 106, 094308 (2009). 10.1063/1.3243333
51. K. Zhang, M. Brotzmann, and H. Hofsass, New J. Phys. 13, 013033 (2011). 10.1088/1367-2630/13/1/013033
52. B. Davidovitch, M. J. Aziz, and M. P. Brenner, Phys. Rev. B 76, 205420 (2007). 10.1103/PhysRevB.76.205420
53. H. Zhou, L. Zhou, G. Ozaydin, K. F. Ludwig, and R. L. Headrick, Phys. Rev. B 78, 165404 (2008). 10.1103/PhysRevB.78.165404