Liquid polycarbosilane derived SiC coating on silicon (1 1 1) wafer for enhanced mechanical properties

Applied Surface Science

Volumn 270, Issue , 2013, Pages 219-224

  Mukherjee, Jonaki ^a   Ranjan, Ashok ^b   Saxena, A K ^b   Das, Probal Kumar ^a   Banerjee, Rajat ^a  

^a CSIR CENTRAL GLASS AND CERAMIC RESEARCH INSTITUTE   (India)

^b DEFENCE MATERIALS AND STORES RESEARCH AND DEVELOPMENT ESTABLISHMENT   (India)

Author keywords

Hardness; Liquid PCS; Mechanical properties; Precursors organic; SiC

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; ELECTROMECHANICAL DEVICES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; LIQUIDS; MECHANICAL PROPERTIES; MEMS; PARTICLE SIZE; POLYSILANES; SILICON CARBIDE;

AVERAGE PARTICLE SIZE; DEPOSITION TEMPERATURES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MODERATELY HIGH TEMPERATURE; MODIFIED CHEMICAL VAPOR DEPOSITIONS; PRECURSORS-ORGANIC; SILICON CARBIDE COATINGS; X RAY DIFFRACTOMETERS;

SILICON WAFERS;

EID: 84875216481     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.01.003     Document Type: Article

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