Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application

Proceedings of the American Control Conference

Volumn 3, Issue , 2000, Pages 2123-2128

  Croft, D ^a   Shedd, G ^b   Devasia, S ^a  

^a Department of Electrical and Computer Engineering   (United States)

^b EXFO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CREEP; HYSTERESIS; PIEZOELECTRIC DEVICES; VIBRATIONS (MECHANICAL);

PIEZOACTUATOR; SCANNING PROBE MICROSCOPY; ULTRAHIGH PRECISION POSITIONING;

ACTUATORS;

EID: 0034539450     PISSN: 07431619     EISSN: None     Source Type: Journal    
DOI: 10.1109/acc.2000.879576     Document Type: Article

References (0)