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Volumn , Issue , 2009, Pages 2249-2253

A new piezoelectric tube scanner for simultaneous sensing and actuation

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE SENSOR; DISPLACEMENT SENSOR; ELECTRODE PATTERN; INDUCTIVE SENSORS; NANO-POSITIONER; NEW APPROACHES; NOISE COMPONENTS; NON-CONTACT; OPERATING RANGES; PIEZOELECTRIC TUBE SCANNERS; PIEZOELECTRIC TUBES; PIEZOELECTRIC VOLTAGE; POSITION FEEDBACK; SCANNING PROBE MICROSCOPE; THREE ORDERS OF MAGNITUDE;

EID: 70449672790     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2009.5160032     Document Type: Conference Paper
Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.