High-speed high-precision control of atomic force microscope by surface topography learning observer

Proceedings of the American Control Conference

Volumn , Issue , 2009, Pages 961-966

  Shiraishi, Takayuki ^a   Fujimoto, Hiroshi ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; BODE INTEGRAL THEOREM; CAN DESIGN; CONTACT FORCES; CONTROL INPUTS; CONTROL TECHNOLOGIES; CONVENTIONAL SYSTEMS; DISTURBANCE OBSERVER; FEED-FORWARD COMPENSATION; FEEDBACK CONTROLLER; HIGH BANDWIDTH; HIGH SPEED IMAGING; HIGH SPEED MEASUREMENTS; HIGH-SPEED AFM; HIGH-SPEED HIGH-PRECISION; RESEARCH GROUPS; RESONANCE PEAK; SCANNING SPEED; SERVO DESIGN; TRACKING ERRORS;

ATOMIC FORCE MICROSCOPY; ERROR COMPENSATION; FEEDBACK; FLUORINE CONTAINING POLYMERS; MAGNETIC LEVITATION; RESONANCE; SPEED; THREE DIMENSIONAL;

SURFACE TOPOGRAPHY;

EID: 70449625592     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2009.5160749     Document Type: Conference Paper

References (14)

1. D. Y. Abramovitch, S. B. Andersson, L. Y. Pao, and G. Schitter. "A Tutorial on the Mechanisms, Dynamics, and Control of Atomic Force Microscopes," Proc. Amer. Ctrl. Conf., pp. 3488-3502, 2007.
2. N. Kodera, H. Yamashita, and T. Ando, "Active damping of the scanner for high-speed atomic force microscopy," Rev. Sci. Instrum., vol. 76, p. 053708, 2005.
3. G. Schitter, A. Stemmer and F. Allgower, "Robust two-degree offreedom control of an atomic force microscope," Asian Journal of Control, 6, 2, pp. 156-163, 2004.
4. T. Uchihashi, N. Kodera, H. Itoh, H. Yamashita and T. Ando, "Feed-Forward Compensation for High-Speed Atomic Force Microscopy Imaging of Biomolecules," JJAP, vol. 45, No. 3B, pp. 1904-1908, 2006.
5. T. Sulchek, R. Hsieh, J. D. Adams, G. G. Yaralioglu, S. C. Minne, C. F. Quate, J. P. Cleveland, A. Atalar, and D. M. Adderton, " Highspeed tapping mode imaging with active Q control for atomic force microscopy," Applied Physics Letters, vol. 76, p. 1473, 2000.
6. S. Tien, Q. Zou, and S. Devasia, "Iterative Control of Dynamics- Coupling-Caused Errors in Piezo scanners During High-Speed AFM Operation," IEEE Trans. Ctrl. Sys. Tech., vol. 13, no. 6, pp. 921-931, 2005.
7. K.Aoki, H.Fujimoto, "Nano Scale Servo Control of Atomic Force Microscope Based on Surface Topography Observer," IIC-06-132, pp1-6, 2006. (in Japanese)
8. T. shiraishi, H. Fujimoto, "Proposed of Surface Topography Observer for Tapping mode AFM," IIC-07-119, pp. 7-12, 2007. (in Japanese)
9. T. Ohshima, H. Fujimoto, "Proposed of Surface Topography Learning Observer for Contact mode AFM," IIC-07-117, pp. 7-12, 2007. (in Japanese)
10. A. Sebastian, M. V. Salapaka, D. J. Chen and J. P. Clevelamd, "Harmonic analysis based of tapping-mode AFM", Proc. Amer. Ctrl. Conf., pp. 232-236, 1999.
11. S. Salapaka, T. De, and A. Sebastian, "Sample-profile estimate for fast atomic force microscopy," Appl. Phys. Lett., vol. 87, p. 053112, 2005.
12. Jeffrey A. Butterworth, Lucy Y. Pao, Daniel Y. Abramovitch, " Architectures for Tracking Control in Atomic Force Microscopes," in Proc. IFAC 17th World Congress, pp. 8236-8250, 2008.
13. M.Tomizuka: "Zero Phase Error Tracking Algorithm for Digital Control", Trans. ASME, Jounal of Dynamic Systems, Measurement, and Control, Vol.109, pp.65-68 (1987)
14. K. J. As̊tröm and J. Sternby : "Zeros of sampled stetem", Automatica, vol. 20, no.1, pp. 31-38 (1984).